Cavity airflow control system and method

Abstract

The invention provides a cavity airflow control system. The cavity airflow control system comprises a plurality of cavities provided with draught fan filtering units, a central monitoring unit, air detection units and power sensors, wherein the power sensors are connected to the draught fan filtering units and is used for detecting the output power of the draught fan filtering units in the cavities and for sending output power data to the central monitoring unit; the air detection unit is used for sending the air status information of the cavities to the central monitoring unit; and the central monitoring unit is used for processing the information of the air detection units and the power sensors and for sending control commands to the draught fan filtering units for controlling the output power of the draught fan filtering units in the cavities so as to change the flow direction of air. The invention also provides a cavity airflow control method. The cavity airflow control method realizes the function of causing air to flow to the cavities with small ventilation volume from the cavities with large ventilation volume and achieves the technical effects of reducing the quality risk of products produced in the cavities and increasing the yield rate of the products.

Description

technical field [0001] The invention relates to a control system, in particular to a chamber airflow control system and method. Background technique [0002] With the demand for miniaturization and high-definition of products, in many industries including the electronics industry and the electrical industry, in order to maintain product quality, it is necessary to build a manufacturing environment with a higher level of air cleanliness than the general environment. Generally speaking, such a manufacturing environment is called a clean room or a clean room or the like. [0003] Generally speaking, in a clean compartment or clean room, it is called FFU (FanFilterUnits: Fan Filter Unit). The opening of the FFU will cause the pressure in the device to increase, and the air flow in the device will flow to the outside, and the air pressure in different chambers will be different due to other factors such as the brand and quantity of the FFU, and the air flow in the device will fl...

AI Technical Summary

Problems solved by technology

The opening of the FFU will cause the pressure in the device to increase, and the air flow in the device will flow to the outside, and the air pressure in different chambers will be different due to other factors such as the brand and quantity of the FFU, and the air flow in the device will flow to other chambers. From a production point of view, it is undesirable for fine particles such as dust in the airflow to flow into the chamber where the precision equipment is located, because the fine particles such as dust will enter the precision equipment with the airflow, causing great risk to the quality of the product

[0004] Secondly, in the production process, there is usually more than one equipment around the precision equipment, and the flow of air will be affected by the FFUs of many equipments. Since the FFUs of each equipment work independently, there is no feedback adjustment function between each other, so that each equipment The uncontrollability of the flow direction of the airflow in the chamber increases

Images