Unlock instant, AI-driven research and patent intelligence for your innovation.

Edge scan and alignment

A polygon, substrate technology that can be used in sustainable manufacturing/processing, final product manufacturing, manufacturing tools, etc., to solve problems such as ablation of conveyor belts, shortening service life, and affecting solar cell functionality.

Inactive Publication Date: 2015-12-16
APPLIED MATERIALS INC
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these conventional systems may lack an adequate degree of control over hole positioning
For example, not being able to finely control the laser drilling process can result in unwanted holes or via patterns being formed in the substrate or even ablation of the transport zone adjacent to the substrate
Unwanted holes or hole patterns can adversely affect the functionality of the solar cell, and ablation of the carrier tape can shorten the life of the device used to form the holes in the solar cell substrate

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Edge scan and alignment
  • Edge scan and alignment
  • Edge scan and alignment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] Embodiments described herein relate to apparatus and methods for forming (ie, drilling) holes in a substrate by delivering electromagnetic energy to a surface of the substrate. The apparatus includes a platform with a conveyor system to move one or more solar cell substrates relative to an electromagnetic source, such as a moving laser beam. Holes formed in a substrate surface as described herein may include through holes, blind holes, elongated channels, or lines formed at least partially in the substrate surface. The apparatus for forming wells can be used as a stand-alone tool or incorporated into a larger substrate processing system, such as a cluster tool or an in-line substrate processing system.

[0021] Embodiments described herein provide laser scanning devices for laser drilling in one or more layers during the solar cell fabrication process. In one embodiment, the apparatus is used to laser drill holes in a backside passivation layer of a solar cell to enabl...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A method for laser drilling holes in a substrate is provided. A position of a polygonal mirror facet is determined by a first sensor and a position of a substrate disposed on a belt is determined by a second sensor. The positions of the mirror facet and the substrate are synchronized based upon time inputs determined by the first sensor and second sensor, respectively. The position of the substrate may be changed by moving the belt to be synchronized with the facet position prior to laser drilling. A laser may be triggered when the positions of the mirror facet and the substrate have been synchronized. The laser may form one or more rows of holes in the substrate.

Description

[0001] Cross-reference to related applications [0002] This application relates to patent application number PCT / EP2014 / 053352 filed at the European Patent Office, said patent application being entitled "Solar Cell Processing System, Conveyor Belt System, Solar Cell Production Installation and Method (Solar Cell Processing System, Conveyor Belt System, Solar Cell Production Apparatus and Methods)” [Applied Materials Docket No. APPM21692EP], which was incorporated by reference herein, filed on February 20, 2014. technical field [0003] Embodiments described herein generally relate to apparatus and methods for forming holes in one or more layers of a solar cell. More specifically, embodiments provided herein relate to apparatus and methods for laser drilling holes in solar cell surfaces in a solar cell production line. Background technique [0004] Solar cells are photovoltaic devices that convert sunlight directly into electricity. The most common solar cell material is s...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCH01L31/18B23K26/0624B23K26/0821B23K26/0838B23K26/382B23K2103/56H01L31/1876Y02P70/50
Inventor J·L·富兰克林Y·郑L·德桑蒂T·沃尔克斯
Owner APPLIED MATERIALS INC