Substrate sampling method

Abstract

The invention provides a substrate sampling method. The method includes the steps that by setting sampling frequency and to-be-sampled side information, whether the sampling frequency is reached or not is judged by counting substrates when the substrates arrive, and then whether the side information of the substrates is consistent with the to-be-sampled side information, whether the side information of the substrates is the same as side information of stored substrates and whether the substrates are sampled are judged. By adding the side information judging step, products coming from different process chambers and different working tables can be sampled, the problems of the process chambers or the working tables that due to the fixed sampling frequency, substrates sampled each time all come from the same process chamber or the working table on the same side, and sampling omission exists are solved, and product yield is increased.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate sampling method. Background technique [0002] A liquid crystal display (LCD, Liquid Crystal Display) has many advantages such as a thin body, power saving, and no radiation, and has been widely used. Such as: LCD TV, mobile phone, personal digital assistant (PDA), digital camera, computer screen or laptop screen, etc. Generally, a liquid crystal display device includes a housing, a liquid crystal display panel disposed in the housing, and a backlight module disposed in the housing. Among them, the structure of the liquid crystal display panel is mainly composed of a thin film transistor array substrate (Thin Film Transistor Array Substrate, TFT Array Substrate), a color filter substrate (Color Filter, CF), and a liquid crystal layer (Liquid Crystal) arranged between the two substrates. Layer), its working principle is to control the rotation of liquid crystal mole...

AI Technical Summary

Problems solved by technology

However, in the mass production process of the substrate, in order to improve the production efficiency, the process equipment is usually equipped with multiple process chambers or multiple side stages, and multiple process chambers or stages are simultaneously processed. In this way, for multiple substrates produced by different process chambers or workbenches, combined with a fixed sampling frequency, the substrates for each sampling inspection may come from the same process chamber or workbench on the same side, and cannot Sampling to other process chambers or workbenches leads to missed detection of substrates made by defective process chambers or workbenches, resulting in failure to detect product abnormalities in time and reducing product yield

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