Unlock instant, AI-driven research and patent intelligence for your innovation.

Piezoelectric composite material surface electrode and preparation method thereof

A piezoelectric composite material, surface electrode technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the problem that the film adhesion is difficult to meet the actual requirements requirements, it is difficult to ensure the service life of the device, and the electroless Ag plating solution is unstable, so as to achieve the effect of satisfactory adhesion, good compactness and smooth surface

Inactive Publication Date: 2016-02-03
朱振业
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of sol-gel method mainly refers to brushing nano-Ag paddles on the surface of composite materials. The surface Ag thin-film electrodes prepared by this method are simple in process, but the temperature of sintering nano-silver paste is often higher than that of polymer materials used in piezoelectric composite materials. The glass transition temperature and the prepared film are not dense enough, uniform and have low adhesion, so it is difficult to guarantee the service life of the device
Electroless plating technology has attracted people's attention due to its simple process, uniform coating, energy saving, and environmental protection. It has a wide range of applications, but the types of coatings that can be prepared are very limited, and the electroless Ag solution is very unstable. Adhesion is also difficult to meet actual needs

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Piezoelectric composite material surface electrode and preparation method thereof
  • Piezoelectric composite material surface electrode and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0023] Such as figure 1 as shown, figure 1 A schematic flow chart of the piezoelectric composite material surface electrode prepared according to the preparation method of the present invention is shown. Specifically, the preparation method of the surface electrode of the piezoelectric composite material includes: step 1, grinding the surface of the piezoelectric composite material until the roughness is Ra=0.05-0.1; step 2, grinding the surface of the piezoelectric composite material Cleaning, then drying; Step 3, at normal temperature, using DC magnetron sputtering process to prepare a thinner first layer of NiCr alloy film material on the surface of the piezoelectric composite material; Step 4, using DC magnetron sputtering The second layer of Ag thin film material is directly prepared on the first layer of thin film material by the irradiation process.

[0024] In step 2, the organic impurities on the surface of the piezoelectric composite material are removed by ultraso...

Embodiment 1

[0032] Such as figure 2 As shown, in this embodiment, a NiCr / Ag thin film is prepared on the 1-3 type PZT / epoxy piezoelectric composite material 1 (the polymer binder is an epoxy polymer) as a surface electrode. First, grind the surface roughness of the piezoelectric composite material 1 to a composite material with Ra=0.05-0.10, ultrasonically clean it in a trichlorethylene solution for 1 minute, and then use alcohol and deionized water to ultrasonically clean it twice for 10 minutes each. , and then dry the composite with a vacuum oven. The equipment used for DC magnetron sputtering is JGP-450A magnetron sputtering system. During the preparation process, the substrate is fixed and stationary. The targets used are NiCr (80 / 20.wt%) alloy target with a purity of 99.95% and an Ag target with a purity of 99.99%, and the diameter and thickness of the targets are 60 mm and 6 mm, respectively. Magnetron sputtering is carried out under the following conditions: normal temperature...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a preparation method for a piezoelectric composite material surface electrode. The preparation method comprises the following steps of 1, grounding the surface of the piezoelectric composite material; 2, cleaning the grounded surface of the piezoelectric composite material and then drying the cleaned surface; 3, at the room temperature, firstly preparing a first thin film made of NiCr alloy material of a smaller thickness on the surface of the piezoelectric composite material through the DC magnetron sputtering process; 4, directly preparing a second thin film made of Ag material on the first thin film through the DC magnetron sputtering process. The invention also a piezoelectric composite material surface electrode prepared through the above preparation method. The result of microscopic analysis, the result of electrical test and the result of the mechanical test show that, the piezoelectric composite material surface electrode is smooth and uniform in surface, better in conductive property and lower in resistivity. The adhesive force of the piezoelectric composite material surface electrode can meet the requirements of applications.

Description

technical field [0001] The invention relates to a preparation method of a surface electrode, in particular to a preparation method of a piezoelectric composite material surface electrode applied to an ultrasonic transducer or a sensor, especially a 1-3 type piezoelectric composite material, a 2-2 type piezoelectric composite material, and a piezoelectric composite material surface electrode. The electrical composite material and its improved surface electrode preparation method. Background technique [0002] Piezoelectric composite material is the core component of the ultrasonic probe, and it needs to complete the signal conversion between sound-electricity and electricity-acoustic during the working process. In order to reduce the signal and vibration mode interference of the surface electrode on the piezoelectric composite material during the working process, low resistivity, uniform, smooth and good adhesion surface film electrodes are of great significance to improve th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L41/29H01L41/047
Inventor 朱振业
Owner 朱振业