A Thin Film Sputtering Force Sensor Adaptable to Lunar Surface Environment

Abstract

The invention provides a thin-film sputtering force transducer adapting to a lunar environment. The transducer comprises a connecting end, a wiring terminal seat (12), a lead pin (14), and an elastomer (16). The elastomer (16) being a Chiness-character-tu-shaped stepped cylindrical bench includes a thick cylindrical bench and a thin cylindrical bench. A terminal seat through hole is formed in the wiring terminal seat (12) along the middle axis; the thin cylindrical bench passes through the terminal seat through hole and is connected with one end of the connecting end for exerting an axial tensile force on the elastomer (16); and the thick cylindrical bench is fixedly connected with one end of the wiring terminal seat (12). A resistor strain gate graph film is sputtered on the end surface of the thick cylindrical bench of the elastomer (16); the resistor strain gate graph film includes four resistor bridge arms; and when the axial tensile force is exerted on the elastomer (16), the resistance values of the four resistor bridge arms are changed. The two ends of the four resistor bridge arms are connected with the external world by the lead pin (14), so that the differential voltage change is measured to obtain the axial force. The provided transducer is not easy to affect by the interference on the non-axial force and is suitable for large working temperature zone.

Description

technical field [0001] The invention relates to a force sensor, in particular to a film sputtering force sensor. Background technique [0002] Generally, the minimum operating temperature of the strain gauge force sensor is -50°C. For example, when the patch type force sensor is below -50°C, it will often fail or have performance degradation due to the brittle adhesive. The specific manifestation is that it will cause large temperature drift and test error. For the application environment with a wide range of temperature changes on the lunar surface, a common countermeasure is to add a complex temperature compensation circuit, but even so, it is difficult to achieve accurate measurement under a wide temperature range. The current compensation temperature range that can be achieved is -20 ° C ~ 50°C. [0003] Thin film sputtering technology is a thin film technology that uses low-energy accelerator bombardment, kinetic energy conversion and transfer of atoms to deposit thin...

AI Technical Summary

Problems solved by technology

The prior art does not utilize thin film sputtering technology to measure the sensor of axial tension

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