Substrate processing system
A transfer plate and space technology, applied in the field of transfer plate, can solve the problems of slowing down the loading speed and increasing the risk of damage, and achieve the effect of enhanced loading automation
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[0012] figure 1 A device to which a transfer plate according to the invention is applied is shown. Here, the pallet 11 containing the load cells 10 is brought by a roller conveyor 13 forming a transfer conveyor 12 to a loading area in which there are two charging devices 14 and two transfer plates 15 with transfer elements 16 . There can be one or more transfer members. In this example there is an intermediate conveyor 17 between the transfer conveyor 12 and the charging device 14 . Thus, when one transfer plate 15 is moved into the cargo space 18, the second transfer plate 15 can already be filled. If necessary, several charging devices can be arranged in the loading area. In addition, a rotating device 19 for rotating the trays 11 is assembled to the intermediate conveyor 17 . In this way, it is possible to turn the pallet at the final stage. At the same time, one transfer plate can even be loaded with trays of different sizes and the placement of the trays can be optim...
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