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A kind of solar spectrum selective absorption coating and preparation method thereof

A technology of absorbing coating and solar spectrum, which is applied in the field of solar thermal utilization, can solve the problems of unsatisfactory thermal aging test and salt spray test results, high emissivity, etc., and achieve high temperature resistance, excellent optical performance, and good weather resistance Effect

Active Publication Date: 2019-02-05
GRIMAT ENG INST CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, AlN-Al adopts the traditional glass vacuum tube film forming technology, the film system is mature, the absorption rate is >92%, and the emissivity is <5%, but the results of thermal aging test and salt spray test are not ideal
(Nitrogen) nickel chromium oxide plus protective layer absorption rate is better than 93%, with protective coating, good weather resistance, but the emissivity is higher than 10%

Method used

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  • A kind of solar spectrum selective absorption coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] In Mo / Mo x Al 1-x o y N 1-y / AlON / SiON spectral selective absorption coating as an example, the preparation steps are as follows:

[0033] Step 1: Prepare a metal infrared high reflective layer; use a metal Mo target (purity of 99.99%) DC magnetron sputtering method to pre-evacuate the vacuum chamber to 1.0×10 -3 pa, feed Ar with a purity of 99.999% as the sputtering gas, the flow rate is 180sccm, and the sputtering pressure is adjusted to 4.5×10 -1 pa. Turn on the Mo target with a power of 20KW and sputter for 10min to prepare a 100nm Mo film.

[0034] Step 2: Prepare the absorbing layer; select a Mo target with a purity of 99.99% and an Al target with a purity of 99.99%, feed Ar with a purity of 99.999% as the sputtering gas, fix the Ar flow rate at 180 sccm, and feed the Ar with a purity of 99.999%. N 2 As a reaction gas, the fixed flow rate is 100 sccm, and the purity of 99.999% O 2 As a reactive gas, the flow rate is gradually increased from 0 to 30 sccm. ...

Embodiment 2

[0039] in W / W x Al 1-x o y N 1-y / AlN / Al 2 o 3 / SiON spectral selective absorption coating as an example, the preparation steps are as follows:

[0040] Step 1: Prepare a metal infrared high reflective layer; use a metal W target (purity of 99.99%) DC magnetron sputtering method to pre-evacuate the vacuum chamber to 1.0×10 -3 pa, feed Ar with a purity of 99.999% as the sputtering gas, the flow rate is 180sccm, and the sputtering pressure is adjusted to 4.5×10 -1 pa. Turn on the W target with a power of 20KW and sputter for 15 minutes to prepare a 150nm W film.

[0041] Step 2: Prepare the absorbing layer; select a W target with a purity of 99.99% and an Al target with a purity of 99.99%, feed Ar with a purity of 99.999% as the sputtering gas, fix the Ar flow rate at 180 sccm, and feed the Ar with a purity of 99.999%. N 2 As a reaction gas, the fixed flow rate is 120 sccm, and the purity of 99.999% O 2 As a reactive gas, the flow rate was gradually increased from 0 to...

Embodiment 3

[0046] In Mo / Mo x Al 1-x o y N 1-y / Al 2 o 3 / Si 3 N 4 Taking the spectrally selective absorbing coating as an example, the preparation steps are as follows:

[0047] Step 1: Prepare a metal infrared high reflective layer; use a metal Mo target (purity of 99.99%) DC magnetron sputtering method to pre-evacuate the vacuum chamber to 1.0×10 -3 pa, feed Ar with a purity of 99.999% as the sputtering gas, the flow rate is 180sccm, and the sputtering pressure is adjusted to 4.5×10 -1 pa. Turn on the Mo target with a power of 20KW and sputter for 20min to prepare a 200nm Mo film.

[0048] Step 2: Prepare the absorbing layer; select a Mo target with a purity of 99.99% and an Al target with a purity of 99.99%, feed Ar with a purity of 99.999% as the sputtering gas, fix the Ar flow rate at 180 sccm, and feed the Ar with a purity of 99.999%. N 2 As a reaction gas, the fixed flow rate is 120 sccm, and the purity of 99.999% O 2 As a reactive gas, the flow rate was gradually incr...

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Abstract

The invention discloses a solar spectrum selective absorption coating and a preparation method thereof. The absorption coating comprises a metal infrared high-reflection layer, an absorption layer, an antireflection layer and a protection layer which are successively arranged outwards from a substrate, wherein the absorption layer is formed by transition metal nitrogen oxide MoxAl1-xOyN1-y or WxAl1-xOyN1-y; x is 0.1-0.9; y is 0.1-0.9. The preparation method of the solar spectrum selective absorption coating comprises the following steps: (1) preparing the metal infrared high-reflection layer on the surface of the substrate via a direct-current magnetron sputtering method; (2) carrying out co-sputtering of an Mo or W and Al pure metal target or an MoAl or WAl target with fixed components in the atmosphere of argon, nitrogen and oxygen to form the adsorption layer; (3) selecting an Al target and preparing the antireflection layer via a direct-current or medium-frequency magnetron sputtering method; and (4) selecting an Si target and preparing the protection layer via the direct-current or medium-frequency magnetron sputtering method. The absorption coating has the characteristics of excellent optical performance, strong high temperature resistance and excellent weather resistance; the preparation method of the absorption coating is easy to implement and simple to regulate, and is suitable for the application status of flat plate collectors in China.

Description

technical field [0001] The invention relates to a solar spectrum selective absorption coating (heat-absorbing coating) and a preparation method thereof, which can be used in flat plate heat collectors, and can also be used in solar industrial heating, solar air conditioning and solar seawater desalination systems, belonging to solar energy Photothermal utilization technology field. Background technique [0002] The solar spectrum selective absorption coating (heat-absorbing coating) is a special surface characterized by a high absorption rate α in the solar spectral range (0.3-2.5 μm) and a high absorption rate in the infrared region (2.5-25 μm). Very low emissivity ε, it converts low-energy-density solar energy into high-energy-density thermal energy, enriches solar energy, and improves solar light-to-heat conversion efficiency. It is the core material of solar panel collectors. The main purpose of the research on absorbing coatings is to improve the efficiency of solar th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F24S70/225B32B15/04B32B9/04B32B33/00C23C14/35C23C14/06
CPCY02E10/40
Inventor 杜淼郝雷杨海龄张子楠余航王笑静于庆河刘晓鹏蒋利军
Owner GRIMAT ENG INST CO LTD