Plastic mold for fusion plastic water content detection
A technology of plastic moulds, molten plastics, applied in measuring devices, analytical materials, material capacitance, etc., can solve the problem that the water vapor detection of molten plastics is not taken seriously, and achieve increased moisture sensitivity, enhanced adsorption, and high sensitivity Effect
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Embodiment 1
[0039] A plastic mold used for detecting the moisture content of molten plastic, a moisture sensitive sensor module is installed on the outside of the fixed mold part of the plastic mold, and the moisture sensitive sensor module includes heavily doped silicon chips arranged sequentially from bottom to top, closely attached to SiO heavily doped silicon 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 50nm, 250nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydrox...
Embodiment 2
[0058] A plastic mold used for detecting the moisture content of molten plastic, a moisture sensitive sensor module is installed on the outside of the fixed mold part of the plastic mold, and the moisture sensitive sensor module includes heavily doped silicon chips arranged sequentially from bottom to top, closely attached to SiO heavily doped silicon 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 30nm, 125nm and 500nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydrox...
Embodiment 3
[0077] A plastic mold used for detecting the moisture content of molten plastic, a moisture sensitive sensor module is installed on the outside of the fixed mold part of the plastic mold, and the moisture sensitive sensor module includes heavily doped silicon chips arranged sequentially from bottom to top, closely attached to SiO heavily doped silicon 2 layer, carbon nanotube layer, on SiO 2 The lower electrode between the layers and the upper electrode on the carbon nanotube layer grown on SiO 2 layer; there is a metal film on the lower electrode, and the metal film is an adhesive Cr layer, a conductive and thermally conductive Cu layer, and an Au layer as an electrode layer from the inside to the outside, and the Cr layer, Cu layer and The thickness of the Au layer is 60nm, 160nm and 400nm in sequence; the carbon nanotube layer adopts catalyst and / or photolithography to achieve its localized growth, and the grown carbon nanotube layer adopts plasma to make it produce hydrox...
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