An imaging automatic adjustment device and control method of a white light interference atomic force probe system

Abstract

The invention discloses an imaging automatic adjusting device based on a white light interference atomic force probe scanning microscope probe system and a control method thereof. The device mainly comprises a computer, a clamping mechanism, a hinge mechanism, an atomic force probe and a probe assembly, a white light interference microscope system and a plane CCD light path connecting tube. In a condition in which connection of the white light interference atomic force probe microscope is completed, according to a horizontal included angle between imaging of the probe on the surface CCD and a plane CCD coordinate system, an actuator is controlled to deflect for a certain angle through a computer, the included angle between the imaging of the atomic force probe in the plane CCD and the plane CCD coordinate system is in an error range, and thus, the measured result has a small measurement error. Imaging of the probe in the plane CCD is automatically adjusted, the device and the method have the advantages of convenient control, high control precision and simple operation.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise surface topography measurement. More specifically, it refers to an automatic control device and control method for white light interference atomic force scanning probe scanning microscope probe imaging. Background technique [0002] The white light interference atomic force scanning probe microscope uses the zero-order fringes of white light to quantify the deformation of the atomic force scanning probe, thereby indirectly obtaining the height of the workpiece surface. The deformation principle of the atomic force scanning probe is the van der Waals force between atoms. During measurement, the tip of the atomic force scanning probe is equivalent to an atom, and an atom on the surface of the sample to be measured will interact with the tip of the atomic force scanning probe, causing the cantilever of the atomic force scanning probe to deform. The white light interference fringes formed on t...

AI Technical Summary

Problems solved by technology

[0004] Since the white light interference atomic force probe scanning microscope has very high requirements on the environment, the photoelectric components need to be sealed under certain conditions. After the white light interference atomic force probe scanning microscope is installed, it is not convenient to disassemble frequently, but when replacing the probe It is often necessary to adjust the angle between the surface CCD and the probe within the required range. However, it is difficult to adjust the angle within the required range by manual adjustment. In order to achieve convenient and fast high-precision adjustment, automatic adjustment Device and control method thereof

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