Strain sensor based on flexible capacitor and manufacturing and test method thereof

Abstract

The present invention relates to a strain sensor based on a flexible capacitor and a manufacturing and test method thereof. The strain sensor comprises a substrate on which a bottom-layer metal polar plate, a SiO dielectric layer and an upper-layer metal polar plate which are arranged orderly from bottom to top, and a SU-8 isolating and shielding layer covering the bottom-layer metal polar plate, the SiO dielectric layer and the upper-layer metal polar plate is also arranged on the substrate. A bottom-layer metal polar plate leading-out end socket and an upper-layer metal polar plate leading-out end socket are arranged on the upper end face of the SU-8 isolating and shielding layer separately, and a bottom-layer metal through hole used for connecting the bottom-layer metal polar plate and the bottom-layer metal polar plate leading-out end socket, and an upper-layer metal through hole used for connecting the upper-layer metal polar plate and the upper-layer metal polar plate leading-out end socket are arranged in the SU-8 isolating and shielding layer. The strain sensor based on the flexible capacitor and the manufacturing and test method of the strain sensor of the present invention can measure the tiny strain change on the surface of a device effectively, are high in sensitivity, enable the measurement range of the sensor to be improved substantially, have the advantages of high film formation quality, good adhesiveness, thin thickness, small internal stress, etc., and can effectively solve the adhesiveness problem of a capacitance strain sensor and the substrate.

Description

technical field [0001] The invention relates to a strain sensor. In particular, it relates to a strain sensor based on flexible capacitance and its use and manufacturing method. Background technique [0002] Strain sensors play an important role in the study of mechanical properties and mechanical behavior of various components. At present, there are many types of strain sensors such as wire type, foil type, thin film type, metal, semiconductor, etc., most of which are based on the piezoresistive effect, that is, the resistance changes proportionally with the change of strain. For example, patent CN104006735A discloses a resistor formed by printing a resistor, a dielectric and a conductive paint on a ceramic substrate by using a thick film process. When the thick film resistor is deformed due to external force, the distribution of conductive particles in the matrix will change, which in turn will cause a change in the resistance value of the material. Patent CN104880143A ...

AI Technical Summary

Problems solved by technology

However, the resistance strain sensor is too sensitive to temperature. After being affected by temperature changes, it will produce zero point drift and sensitivity drift, which will increase the measurement error, and adding a temperature compensation circuit often leads to a large and complex system.

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