Method for fabricating chalcogenide films
A technology of chalcogenide and manufacturing method, which is used in semiconductor/solid-state device manufacturing, gaseous chemical plating, metal material coating process, etc.
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[0039] The objects, features and advantages of the embodiments of the present disclosure can be better understood by referring to the following detailed description in conjunction with the accompanying drawings. Embodiments of the present disclosure provide alternative embodiments to describe alternative features for practicing the method. Furthermore, the configuration of each component in the embodiment is used to explain the present disclosure but not to limit the scope of the present disclosure. In addition, repeated symbols or symbols may be used in different embodiments, and these repetitions are only for the purpose of simply and clearly describing the present disclosure, and do not mean that there is a specific relationship between the different embodiments and / or structures discussed.
[0040] The terms "about" and "substantially" usually mean + / - 20%, more usually + / - 10%, more usually + / - 5% of the stated value. The values stated in this disclosure are approximat...
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Abstract
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