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Laser processing apparatus

A laser processing and laser beam technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve problems such as longer processing time

Active Publication Date: 2016-09-14
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the processing time becomes longer

Method used

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  • Laser processing apparatus
  • Laser processing apparatus
  • Laser processing apparatus

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Embodiment Construction

[0027] figure 1 A schematic diagram of the laser processing apparatus of the embodiment is shown in FIG. If the laser light source 10 receives the output command signal sig1 from the control device 20, the laser light source 10 outputs a pulsed laser beam L1. The output command signal sig1 is a pulse signal, and one laser pulse of the pulsed laser beam L1 is output for one pulse of the output command signal sig1. The laser light source 10 uses, for example, a carbon dioxide laser, a Nd:YAG laser, or the like.

[0028] The pulsed laser beam L1 output from the laser light source 10 enters the object 30 to be processed via the switch 11, the folding mirror 12, the beam deflector 13, and the fθ lens 14. The object 30 to be processed is held on the XY stage 15. The switch 11 switches between the open state and the closed state according to the switching signal sig2 received from the control device 20. When the switch 11 is in the open state, the incident pulsed laser beam L1 is inc...

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Abstract

The invention provides a laser processing apparatus which can restrain pulse energy deviation and meanwhile prolong processing time. A beam deflector allows the emission position of a pulse laser beam to move on the surface of a processing object, and sends a positioning ending signal when movement ends. When a switcher is in an open state, a pulse laser beam emits into the beam deflector from a laser light source, and does not emit into the beam deflector in a closing state. In a period of receiving a movement command signal sent by a beam deflector, and then receiving a positioning ending signal, a control device allows a switch to be in a closing state, and sends an outputting instruction signal with constant first repeating frequency. If a positioning ending signal is received, second repeating frequency from a front outputting instruction signal until a next instruction signal is selected in a frequency change scope including the first repeating frequency. A next outputting instruction signal is sent to a laser source with the second repeating frequency so as to perform processing in a high quality processing mode.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2015-044283 filed on March 6, 2015. The entire contents of this Japanese application are incorporated in this specification by reference. Technical field [0002] The invention relates to a laser processing device. Background technique [0003] When the laser is used for drilling, the galvanometer is used to scan the galvanometer to swing the laser beam in a two-dimensional direction, so that the laser beam is incident on the processed point. After the laser beam is incident on one point to be processed, the galvanometer is operated to scan the galvanometer to move the incident position of the laser beam to the next point to be processed. The galvanometer scanning galvanometer is positioned at the next processing point as an opportunity to output a pulsed laser beam. If the interval between the processed points is not constant, the time required to move the incident position to the next processed po...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/382B23K26/064B23K26/0622
CPCB23K26/0643B23K26/0648
Inventor 石原裕
Owner SUMITOMO HEAVY IND LTD