Optical grating infinitesimal displacement detection device

Abstract

The invention relates to an optical grating infinitesimal displacement detection device. The optical grating infinitesimal displacement detection device includes an optical grating displacement sensor, a circuit module, a main control module and a display; the optical grating displacement sensor comprises a light source, a scale optical grating, an indication optical grating, a photoelectric detector and a pre-posed signal processing circuit; the scale optical grating is connected with a base; the light source, the indication optical grating, the photoelectric detector and the pre-posed signal processing circuit are integrated together so as to be adopted as an optical grating reading head and are connected with a mobile component; the circuit module includes a differential amplification circuit, a filtering circuit, a shaping and direction judgment circuit and is used for judging the direction of displacement; the main control module carries out counting processing on the pulse signals of the optical grating displacement sensor and feeds back a processing result to the displacement sensor; the display is used for displaying the basic information of current optical grating displacement amount; and the display and the main control module are integrated together. According to the optical grating infinitesimal displacement detection device of the invention, an embedded technology and an optical grating moire fringe technology are combined together so as to be applied to the automatic measurement of infinitesimal displacement. The optical grating infinitesimal displacement detection device has the advantages of intellectualization, multifunctionality, high precision and long-distance measurement and control and the like.

Description

technical field [0001] The invention belongs to the field of automatic precision detection, which combines embedded technology and grating moiré fringe technology, and is a grating micro-displacement detection device for automatically measuring micro-displacement. Background technique [0002] The measurement of tiny displacement is very important in precision machining and physical experiments. Traditional micro-displacement measurement methods mainly include optical lever amplification method, Hall displacement measurement method, and Michelson interferometry. These traditional displacement measuring instruments are high in cost, large in size, complex in structure, inconvenient to control, and cannot realize intelligent measurement and instrument productization. Metering grating is recognized as an ideal precise and small displacement measuring element. The grating displacement measuring instrument made by Moiré fringe technology has the optical characteristics of high d...

AI Technical Summary

Problems solved by technology

However, the circuit system of the traditional grating-type micro-displacement measuring instrument is very complicated, and the cost is high, which is not conducive to the promotion of the grating-type micro-displacement measuring instrument.

Images