System for precise grinding of large-diameter off-axis aspherical mirror
An off-axis aspheric, precision grinding technology, applied in the direction of grinding machine parts, grinding/polishing equipment, lenses, etc., can solve the movement that is difficult to achieve aspheric profile, it is difficult to obtain ideal surface accuracy, etc. problem, to achieve the effect of efficient automatic ultra-precision grinding, reducing dependence, and improving processing efficiency
Active Publication Date: 2016-09-28
成都精密光学工程研究中心
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Problems solved by technology
The vector height of each point on the off-axis aspheric surface is inconsistent, and the radius of curvature of each point is also different. Therefore, it is difficult to realize the movement of the aspheric profile by using the traditional G code for interpolation motion control; in addition, the optical processing accuracy is extremely high. Due to the influence of the positioning error of the machine tool itself and the fluctuation of ambient temperature, it is difficult to obtain an optical surface with ideal surface accuracy by using a forming grinder in one process. It is necessary to use in-position error compensation technology to achieve further convergence of surface accuracy
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[0022] The system of the present invention includes four subsystems: a grinding wheel shape precision measurement subsystem; an aspherical surface initial grinding processing subsystem; an aspheric surface shape in-position detection subsystem; an aspheric surface compensation grinding processing subsystem.
[0023] The grinding wheel shape accuracy measurement subsystem includes: a detection program output module and a detection data analysis module. The arc topography of the grinding surface of different phases of the grinding wheel is detected respectively, and the displacement data of the surface topography are obtained. figure 1 It is the operation interface of the grinding wheel shape accuracy measurement subsystem. After the user reads the displacement data, the software extracts the original contour f of the arc at different phases i , the arc fitting is automatically performed on the original contour data, and the arc radius R at different phases is obtained i , cent...
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The invention provides a system for automatic precise grinding procesing of a large-diameter off-axis aspherical mirror. Aspherical grinding NC program is automatically calculated and generated according to input of a processing technological parameter and an aspherical parameter, and in-place compensation of a surface shape error is carried out. The system for precise grinding of the large-diameter off-axis aspherical mirror comprises a grinding wheel shape precision measurement subsystem, an aspherical surface initial grinding processing subsystem, an aspherical surface shape in-place detection subsystem and an aspherical surface compensation grinding processing subsystem. The system realizes automatic generation of the NC programs of aspherical surface initial machining, surface shape in-place detection and compensation processing and automatically calculates and analyzes the circular arc radius, the circular arc radian error, the center error and other parameters of a diamond grinding wheel; compared with traditional grinding processing, the overall processing efficiency of a single large-diameter off-axis aspherical component is improved by 8-10 times and efficient automatic ultraprecise grinding processing of the large-diameter off-axis aspherical mirror is realized.
Description
technical field [0001] The invention relates to the field of precision machining of optical elements, in particular to a computer-aided manufacturing (CAM) system for ultra-precision molding and grinding of large-diameter off-axis aspheric optical elements. Background technique [0002] With the continuous development of laser technology, large-aperture high-power laser drivers, as an important branch of laser technology, have important applications in inertial confinement nuclear fusion, such as the NIF device in the United States. As the largest optical project in the world, the requirements of high-power laser drivers are much higher than those of any optical system so far in terms of the quantity and quality of large-aperture optical components. The off-axis aspheric mirror is one of the important components of the high-power laser driver terminal optical assembly. Its function is to focus the large-diameter mixed-frequency laser input from the front-end separately, and ...
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Login to View More IPC IPC(8): B24B13/06B24B49/00B24B49/02
CPCB24B13/06B24B49/00B24B49/02
Inventor 周炼雷向阳谢瑞清赵世杰陈贤华张清华王键
Owner 成都精密光学工程研究中心