Cantilever biochemical sensor based on giant piezoresistive structure and fabrication method of cantilever

Abstract

The invention provides a giant piezoresistive structure based cantilever beam biochemical sensor and a production method of a cantilever beam. The data collector of the sensor adopts a giant piezoresistive structure based cantilever beam structure formed by silicon aluminum heterojunctions, and can generate a great resistance value under the same stress condition, thus fundamentally improving the sensitivity of the biochemical sensor; the two adjacent common-mode signal compensation structures are adopted, so that the measurement precision of each cantilever beam of the biochemical sensor in the complex external environment is ensured, and the impact of failure of a cantilever beam on measurement results is reduced; in addition, the sensor adopts a four-wire measurement method and a signal amplification and wave filtering regulating circuit, so that more accurate signals can be obtained, the impact of noise and other external factors on test results is weakened, and high-precision and stable-measurement effects can be realized.

Description

technical field [0001] The invention relates to a cantilever beam biochemical sensor based on a giant piezoresistive structure and a manufacturing method of the cantilever beam, belonging to the technical field of micro-nano electromechanical system sensors. Background technique [0002] Since the 1980s, with the rapid development of MEMS (micro-electromechanical systems) technology, more and more MEMS devices have been widely used in various fields such as industry and agriculture, aerospace, meteorological environment, national defense and military affairs. In recent years, with the successful development of devices such as microprobes and microflow meters, a large number of MEMS devices have entered the fields of chemical analysis, biological detection, medical screening, and public environmental health monitoring. However, the current biochemical sensors cannot achieve real-time high-precision and high-sensitivity biochemical detection due to the structural limitations o...

AI Technical Summary

Problems solved by technology

However, the traditional piezoresistive cantilever beam sensor has a small resistance gauge factor. As the size of the sensor becomes smaller, due to the limitations of its own structure and process, such as: large-area adsorption causes changes in the elastic constant of the cantilever beam, resulting in frequency shifts. Measurement error; the quality factor of the cantilever beam in the liquid biochemical environment is greatly reduced, resulting in a decrease in sensitivity, etc. This type of sensor can no longer meet the requirements of modern high-sensitivity testing

At the same time, due to the influence of temperature, humidity, light and other factors in the environment, the traditional biochemical sensor lacks signal compensation, resulting in a large deviation in measurement accuracy, which cannot meet the user's high-precision and high-sensitivity biochemical detection requirements under complex external environmental conditions.

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