Multi-stage dry Roots vacuum pump
A Roots vacuum pump, dry technology, applied in the direction of rotary piston pump, pump, pump components, etc., can solve the problems of not adapting to the requirements of energy saving, environmental protection and low emission, limited vacuum degree, large volume, etc., to achieve compact structure and installation. Aspect, small size effect
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[0026] See Figure 1~4 , The present invention relates to a multi-stage dry Roots vacuum pump. The multi-stage dry Roots vacuum pump includes a pump body 1, and the pump body 1 includes a cooling water spacer 1.1 wrapped in an outer layer. The inner cavity of the pump body 1 is divided into a plurality of independent pump cavities along its axial direction. Each pump cavity includes an inner cavity 1.2 and an outer cavity 1.3 (inner cavity) located between the inner cavity 1.2 and the cooling water spacer 1.1. 1.2 and the outer cavity 1.3 are mutually connected), the inner cavity 1.2 of the front and rear adjacent pump cavities is connected to the outer cavity 1.3 (the inner cavity 1.2 is the suction cavity, and the outer cavity 1.3 is the exhaust cavity, such as Figure 4 As shown, the exhaust cavity of the previous stage pump cavity is connected to the suction cavity of the next stage pump cavity);
[0027] A shaft 6 penetrates through the pump body 1, and a plurality of pairs ...
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