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Hollow hot-film type flow sensor and manufacturing and integrating method thereof

A flow sensor, hot film technology, applied in the direction of measuring flow/mass flow, liquid/fluid solid measurement, instruments, etc., can solve the problems of different flow sensor signal control and processing circuits, complicated structure, etc., and achieve easy mass production , short response time and high measurement accuracy

Inactive Publication Date: 2016-10-12
北京启芯传感科技有限公司
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  • Claims
  • Application Information

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Problems solved by technology

[0004]Due to different application fields, there are many types of thermal flowmeters in the market, with complex structures, and flow sensors in different application fields have different structural designs and packaging forms. Not the same, different working methods also cause the signal control and processing circuits of the flow sensor to be different

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  • Hollow hot-film type flow sensor and manufacturing and integrating method thereof
  • Hollow hot-film type flow sensor and manufacturing and integrating method thereof
  • Hollow hot-film type flow sensor and manufacturing and integrating method thereof

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Embodiment Construction

[0047] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art.

[0048] See attached picture 1 To the attached picture 2 , The hollow hot film flow sensor in this embodiment includes a flow sensor unit 1 And signal control and processing circuit unit 2 , Flow sensor unit 1 Includes silicon substrate 11 , Located on the silicon substrate 11 With heating resistor 150 And thin film structure of multiple temperature measuring elements, silicon substrate 11 With adiabatic cavity 111 , The membrane structure is located in the adiabatic cavity 111 The upper part is defined as a thermal film, connected to a heating resistor 150 And each signal lead of multiple temperature measuring elements 17 by TSV Technology leads to the flow sensor unit 1 On the back, and with the signal contr...

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Abstract

The present invention relates to a hollow hot-film type flow sensor and a manufacturing and integrating method thereof. The hollow hot-film type flow sensor comprises a flow sensor unit and a signal control and processing circuit unit. The flow sensor unit comprises a silicon substrate, and a film structure positioned on the silicon substrate and provided with heating resistors and a plurality of temperature measurement elements. Signal lead wires for connecting the heating resistors and the plurality of temperature measurement elements are introduced to the back side of the flow sensor unit through a TVS technology and are integrated and connected with the signal control and processing circuit unit in a bonding manner.

Description

technical field [0001] The invention relates to a hollow hot-film flow sensor based on MEMS technology and a fabrication and integration method thereof, belonging to the field of micromachining. Background technique [0002] Flow measurement is widely used in energy, biology, automobile, aerospace, scientific research, industrial process control and other fields, such as water, natural gas, steam and oil in the energy field, and blood, urine and other common energy monitoring in biotechnology. Monitoring of fluids, etc.; air intake monitoring of automobile engines and other fields use a huge number of flowmeters, which are indispensable tools for energy management, efficient utilization, and economic accounting. It is also an important tool to efficiently utilize energy, realize energy saving and consumption reduction, reduce environmental pollution, improve product quality, improve economic efficiency and management level, and occupies an important position in the national ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/692
CPCG01F1/692
Inventor 崔雁红王丽君蔡琳
Owner 北京启芯传感科技有限公司