Water cooling annular hot cathode ion source neutralizer

Abstract

The invention discloses a water cooling annular hot cathode ion source neutralizer, belonging to the photoelectric technology field. The water cooling annular hot cathode ion source neutralizer comprises a main body, a diaphragm, an electrode fixing plate, a tungsten filament electrode column, a front side electrode and a back side electrode; the electrode fixing plate is fixed on the main body; the diaphragm is fixed on the upper end of the main body; the tungsten filament electrode column passes through the electrode fixing plate; the front side electrode and the back side electrode are fixed on the electrode fixing plate; the water cooling annular hot cathode ion source neutralizer also comprises a cooling water pipe and the annular tungsten filament; the annular tungsten filament is fixed on the main body; the front side electrode and the back side electrode respectively sleeve the lower end of the tungsten filament electrode; the cooling water pipe is fixed on a concave semi-circle groove on the outer side of the main body. The water cooling annular thermionic cathode ion source neutralizer is simple in structure, economic and practical, easy in usage, low in cost and long in service life. The water cooling annular hot cathode ion source neutralizer adopts the water cooling mode to reduce an affect on stability of the system which is caused by temperature increment due to hot cathode heating and an affect caused by processing to remove stability, and enables the ion source to be more stable and reliable in the application.

Description

technical field [0001] The invention relates to photoelectric technology, especially ion source technology, and belongs to the field of photoelectric technology. Background technique [0002] Ion beam polishing technology is currently the most advanced processing technology with the highest precision. Because ion beam polishing has the characteristics of flexible processing, removal stability, and high precision, it is an ideal means for processing sub-nanometer precision lithography objective lenses. Therefore, ion sources have very broad application prospects in the field of advanced optical manufacturing. [0003] With the development of modern industry, especially with the development of large-scale integrated circuits, ion sources are widely used in ion etching equipment for integrated circuit production, deposition of metal layers and metal leads, and coating machines for dielectric films, and submicron ultra-large-scale integration. Ion beam exposure machines in the ...

AI Technical Summary

Problems solved by technology

However, the traditional hot cathode neutralizer uses a tungsten wire to emit electrons. The tungsten wire is bombarded by the ion beam, resulting in a short life of the tungsten wire, which affects the use of the neutralizer. The internal material is sputtered, polluting the insulating ceramics, causing a short circuit and affecting the use, reducing the stability of the neutralizer

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