Electrode system for chemical vapor deposition of diamond coating on the surface of microtools by hot wire method
A technology of chemical vapor deposition and diamond coating, which is applied in the field of electrode systems, can solve problems such as reaction heating, and achieve the effects of avoiding sagging, compact overall structure, and strong heat resistance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
specific Embodiment approach 1
[0014] Specific implementation mode one: as Figure 1~Figure 3 As shown, the electrode system of the microcutter surface hot wire chemical vapor deposition diamond coating of the present embodiment includes a base 15, a fixed electrode assembly, a moving electrode assembly and a vacuum ceramic electrode assembly; the fixed electrode assembly includes a fixed end Column 1, fixed end large electrode 2, fixed end small electrode 3 and three hot wires 4; the mobile electrode assembly includes a moving plate 6, a moving end small electrode 7, a support plate 10, a moving end column 11, and four lifting ring screws 5. Two tension springs 8 and two spring fixed installation blocks 9, the two spring fixed installation blocks 9 are respectively spring fixed installation block one 9-1 and spring fixed installation block two 9-2;
[0015] The lower end of the fixed end column 1 is detachably fixed on the base 15 (preferably, the middle part of the lower surface of the fixed end column 1 ...
specific Embodiment approach 2
[0018] Specific implementation mode two: as figure 1 As shown in the specific embodiment 1, an electrode system for chemical vapor deposition of a diamond coating on the surface of a micro-tool according to the first embodiment, the projection of the three hot wires 4 on the vertical plane is arranged in an isosceles triangle. Uniform heating of the microknife can be achieved.
specific Embodiment approach 3
[0019] Specific implementation mode three: as Figure 1~Figure 3 As shown in the specific embodiment 1, a kind of electrode system for chemical vapor deposition diamond coating on the surface of a micro-tool according to the first embodiment, the upper end surface of the small electrode 3 at the fixed end is arranged along the arrangement direction of the three hot wires 4 Semicircular guide groove 1 3-1, the upper end surface of the large electrode 2 at the fixed end is provided with two semicircular guide groove 2 2-1 along the arrangement direction of the three hot wires 4, and the moving end is small The upper end surface of the electrode 7 is provided with three semicircular guide grooves 3 7-1 along the arrangement direction of the three hot wires 4 . The filamentary spaces used to guide the three hot wires 4 are arranged in parallel, so as to prevent the vacuum chamber from being caused by the volume expansion of the three hot wires 4 during the heating and reaction pro...
PUM
| Property | Measurement | Unit |
|---|---|---|
| melting point | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More