A Two-Dimensional Optical Fiber Array Spectral Detection System for Plasma Detection

Abstract

The invention provides a two-dimensional fiber array spectrum detection system for plasma detection. The two-dimensional fiber array spectrum detection system comprises an incident fiber, a Czemy-Turne optical path structure, an area array fiber, a photomultiplier tube array, an amplifier and a counter, wherein the Czemy-Turne optical path structure is arranged on the downstream of the incident fiber; the area array fiber consists of an incident end and an emergent end, the incident end is connected with an output end of the Czemy-Turne optical path structure; the photomultiplier tube array comprises a plurality of photomultiplier tube units, each photomultiplier tube unit is used for receiving the output of one fiber beam from the emergent end of the area array fiber; the amplifier is used for amplifying an electric signal output by the photomultiplier tube array; and the counter is electrically connected with the amplifier, and used for counting the number of photon transformed from the electric signal transmitted by the amplifier. The spectrum detection system has the advantages of high space resolution, high use efficiency of photomultiplier tubes, low cost and the like.

Description

technical field [0001] The invention relates to the field of analytical instruments, in particular to a two-dimensional optical fiber array spectrum detection system for plasma detection. Background technique [0002] A spectrometer is a general-purpose spectral analysis instrument. It decomposes light with complex components into light of different wavelengths through a diffraction grating, and uses optical principles to observe, analyze and process the structure and composition of substances. It is widely used in various fields. For example, in the research and development of IC equipment, by combining the spectrometer with other components such as photomultiplier tubes, the spectral information generated by the plasma glow discharge can be collected and analyzed, the reaction phenomenon can be detected in real time, and the physical parameters of the plasma can be obtained. The device has the advantages of non-intrusive and fast response. At the same time, for the comple...

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Problems solved by technology

However, this structure has the following disadvantages: First, when the optical signal data to be collected is less, fewer photomultiplier tubes can be used, but this will lead to a decrease in the accuracy of the collected data. More photomultiplier tubes will increase the cost

Secondly, since the photomultiplier tubes dissipate more heat during work, more photomultiplier tubes work together to generate more heat. If the heat dissipation cannot be carried out in time, the working temperature of the photomultiplier tubes will rise sharply and generate a lot of thermal noise. , affects the signal-to-noise ratio of the collected data, and cannot obtain ideal data information

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