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Multifunctional Exposure Platform

A multi-functional, platform technology, applied in microlithography exposure equipment, photolithographic process exposure devices, optics, etc., can solve the problems of contact pollution between suction cups and workpieces, large sticking and positioning errors, and many movements, etc., to avoid contact. Pollution, the effect of improving positioning accuracy

Active Publication Date: 2018-02-23
SHENZHEN DACHUAN PHOTOELECTRIC EQUIP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the entire conveying and positioning process, the two manipulators need to perform multiple up-and-down, back-and-forth reciprocating movements, with many movements, long strokes, and low efficiency. In addition, there will be contact pollution between the suction cup and the workpiece, and it is easy to cause sticking and positioning when sucking thin plates. big error problem

Method used

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0021] Such as figure 1 and figure 2 As shown, the present embodiment provides a multifunctional exposure platform 1, which includes a control unit (not shown) and a roller loading mechanism 11, a platform main body 12 and a roller unloading mechanism 13 arranged in sequence, and the platform main body 12 A guide push plate mechanism 14 is provided above, and the guide push plate mechanism 14 includes an L-shaped guide push plate 141 whose opening direction ...

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Abstract

The invention provides a multifunctional exposure platform comprising a control unit, and an idler wheel feeding mechanism, a platform body and an idler wheel discharging mechanism connected in sequence, wherein a guiding push plate mechanism is arranged on the platform body, and comprises an L-shaped guiding push plate with an opening direction facing the side where in idler wheel feeding mechanism is located and an XY plane movement mechanism for driving the L-shaped guiding push plate to respectively move along an X-axis direction and a Y-axis direction on the platform body; the L-shaped guiding push plate comprises an X-axis direction push plate and a Y-axis direction push plate perpendicular to each other; an in-place detection structure is arranged on one side, facing the idler wheel feeding mechanism, of the X-axis direction push plate; the platform body comprises an air bearing and adsorption integrated plane, and a plurality of lift legs are arranged on the bottom side of the platform body; a control unit is electrically connected with the XY plane movement mechanism, the in-place detection structure and the plurality of lift legs respectively; the X-axis direction is parallel to the feeding direction of the idle wheel feeding structure, and the Y-axis direction is perpendicular to the feeding direction of the idler wheel feeding structure.

Description

technical field [0001] The invention relates to the technical field of transmission and positioning of printed circuit boards in automatic exposure, in particular to a multifunctional exposure platform. Background technique [0002] At present, in the automatic exposure process of printed circuit boards, the exposed workpiece is sucked from the exposure platform by the post-mounted manipulator and then transferred to the discharge conveyor line; After the workpiece is picked up on the conveyor line, it is transferred to the exposure platform for positioning and exposure. During the entire conveying and positioning process, the two manipulators need to perform multiple up-and-down, back-and-forth reciprocating movements, with many movements, long strokes, and low efficiency. In addition, there will be contact pollution between the suction cup and the workpiece, and it is easy to cause sticking and positioning when sucking thin plates. The problem of large errors. Contents ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/70733G03F7/70775
Inventor 戴童庆代毓平
Owner SHENZHEN DACHUAN PHOTOELECTRIC EQUIP
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