Dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor

Abstract

The invention relates to a dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor, and relates to a temperature sensor. The dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor is provided with a photonic crystal T-type waveguide, four L3-type micro-cavities and four linear waveguides. The input terminal of the photonic crystal T-type waveguide is used for incidence of a light source, the output terminal of the photonic crystal T-type waveguide is coupled to the four L3-type micro-cavities, the four L3-type micro-cavities are different in resonant frequency, and generate four different resonant wave crests, light of different resonant frequency of the four L3-type micro-cavities is coupled to enter corresponding four linear waveguides, and the four linear waveguides receive a transmission spectrum with four different resonant wave crests through a detector. The dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor is small in size and easy to integrate; by coupling the T-type waveguide with the micro-cavities, a space is left between temperature sensing areas, and temperature crosstalk between different areas is reduced; a temperature change is detected by means of offset of the resonant wave crests of the transmission spectrum, and the sensitivity is high; and a temperature sensing array is achieved, and the dielectric-cylinder-type photonic crystal waveguide and micro-cavity coupled temperature sensor can be used for measuring the temperature of different tiny areas in a lab-on-chip or a system-on-chip in real time.

Description

technical field [0001] The invention relates to a temperature sensor, in particular to a temperature sensor coupled with a dielectric column photonic crystal waveguide and a microcavity. Background technique [0002] Photonic crystals are artificial periodic dielectric structures with photonic bandgap properties. Photonic crystals are widely used in the field of sensing due to their properties such as photon band gap and photon localization. At present, the research on photonic crystal sensors mainly focuses on photonic crystal pressure sensors, biosensors and refractive index sensors, while the research on photonic crystal temperature sensors is relatively less. Compared with traditional temperature sensors, photonic crystal temperature sensors have the advantages of small size, high sensitivity, and easy integration. Among them, (Document 1, C.S.Mallika, Indira Bahadur, P.C. Srikanth, Preeta Sharan, Photonic crystal ring resonator structure for temperature measurement, O...

AI Technical Summary

Problems solved by technology

The above-mentioned photonic crystal temperature sensors are composed of a single linear waveguide coupled with a microcavity, which is a single-sensing measurement, which cannot meet the real-time measurement requirements of multi-point temperature in different tiny areas in a laboratory on a chip or a system on a chip.

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