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A graphite boat loading and unloading device and its loading and unloading method

A graphite boat, directly above technology, applied in the field of graphite boat loading and unloading devices, can solve the problems of inability to enter smoothly, insufficient horizontal space, etc., and achieve the effects of simple structure, convenient operation, and avoiding interference.

Active Publication Date: 2019-05-14
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the traditional graphite boat automatic loading and unloading system, the tray 1 can only enter the support gap 21 of the graphite boat 2 from the horizontal direction. The position of picking and releasing the boat needs to reserve sufficient horizontal movement space for the tray 1. Due to the installed guide rail and PECVD The lower tube pushing boats are basically at the same height, resulting in insufficient horizontal space for the tray 1 on the guide rail and the lower tube loading and unloading boat in the traditional automatic loading and unloading system, interference will occur during the movement, and it cannot smoothly enter the support at both ends of the graphite boat 2 gap 21

Method used

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  • A graphite boat loading and unloading device and its loading and unloading method
  • A graphite boat loading and unloading device and its loading and unloading method
  • A graphite boat loading and unloading device and its loading and unloading method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] The loading and unloading method of the graphite boat loading and unloading device of the present embodiment comprises the following steps:

[0050] Such as Image 6 As shown, S1, the positioning of tray 1: the manipulator drives tray 1 to move to the supporting area 11, which is located directly above the supporting gap 21 of the graphite boat 2, which can ensure that the tray 1 enters the supporting gap 21 in its initial state after two subsequent rotations ;

[0051] S2. The tray 1 is opened: the telescopic rod 4 shrinks, the tray 1 rotates downward around the first hinge part 12, and the supporting area 11 moves to the side of the graphite boat 2, so as to avoid that when the subsequent manipulator drives the tray 1 to move vertically downward, the supporting area 11 Interference with graphite boat 2;

[0052] Such as Figure 7 As shown, S3, pallet 1 descends: the manipulator drives the pallet 1 to move vertically downward until the supporting area 11 is located ...

Embodiment 2

[0057] The loading and unloading method of the graphite boat loading and unloading device of the present embodiment is basically the same as that of Example 1, the difference is that:

[0058] In S2, the telescopic rod 4 can be extended first, the tray 1 rotates upward around the first hinge part 12, and the supporting area 11 moves to the side of the graphite boat 2; correspondingly, in S4, the telescopic rod 4 needs to be contracted, and the tray 1 rotates around the A hinge part 12 is rotated downward, and the supporting area 11 enters into the supporting gap 21, and the same technical effect as that of the first embodiment can also be achieved.

[0059] In addition, it should be noted that since the expansion and contraction process of the telescopic rod 4 is opposite to that of the first embodiment, it is necessary to adapt the maximum telescopic amount of the telescopic rod 4 or replace the telescopic rod 4 with different specifications.

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Abstract

The invention relates to a graphite boat loading and unloading device and a loading and unloading method thereof. The device includes a manipulator, a tray, a telescopic rod and a support. The manipulator is connected to the support, the tray is provided with a bearing area, a first hinge part and a second hinge part along a direction away from the graphite boat in order, the first hinge part is hinged to the lower part of the support, the second hinge part is hinged to the lower end of the telescopic rod, and the upper end of the telescopic rod is hinged to the upper part of the support. The method includes the steps that: S1. the manipulator drives the tray to move to the bearing area right above a bearing gap of the graphite boat; S2. the telescopic rod shrinks, the tray rotates downward around the first hinge part, and the bearing area moves to a side of the graphite boat; S3. the manipulator drives the tray to move vertically downward to the bearing area right below the bearing gap; S4. the telescopic rod extends, the tray rotates upward around the first hinge part, and the bearing area moves into the bearing gap; and S5. the manipulator drives the tray to move vertically upward so as to pick the graphite boat up off a boat taking position. The device and the method provided by the invention can realize smooth grabbing of the graphite boat under the circumstance of an insufficient horizontal movement space.

Description

technical field [0001] The invention relates to the production technology of solar silicon cells, in particular to a graphite boat loading and unloading device and a loading and unloading method thereof. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition, Plasma Enhanced Chemical Vapor Deposition equipment) is one of the most important process equipment in the production line of solar silicon cells, through which a layer of anti-reflection film can be coated on the silicon cells to achieve improved The purpose of cell efficiency. Graphite boat is the carrying tool for silicon cells in the process. Silicon cells are inserted and taken out automatically through the automatic insertion and removal machine (automatic insertion and removal machine is another important equipment to realize the automation of silicon cells production. It is used for the insertion and removal of silicon cells and Take out the graphite boat to realize the exchange of silic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/50
CPCC23C16/50
Inventor 符慧能
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH