Simple and low-cost preparation method for poly(3,4-ethylendioxythiophene)-poly(styrenesulfonate) nanowire
A technology of ethylenedioxythiophene and styrene sulfonic acid, which is applied in the field of conductive polymer micro-nano processing, can solve the problems of high cost of template, time-consuming preparation process, complicated preparation methods, etc., and achieves short preparation time and product yield. The effect of high rate and simple process
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Embodiment 1
[0020] First, poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) was sprayed on a 1×1cm 2 A thin film is formed on the surface of a silicon wafer with a silicon dioxide layer attached on the surface, and the thickness of the film is 20nm.
[0021] Spin-coat polymethyl methacrylate (PMMA) on the surface of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) film, and control the thickness of PMMA film to 150nm. Nanoimprinting was performed on the PMMA surface, the imprinting time was 5min, the imprinting pressure was 40Bar, and the imprinting temperature was 160°C. The imprinting template was a micron-sized silicon template (strip height 500nm, strip width 3μm, and strip spacing 1μm).
[0022] After imprinting, a PMMA double-ridge structure with a size smaller than that of the template is obtained. Then utilize plasma etching technique to transfer PMMA structure to poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) surface, etching condition is: O 2 ...
Embodiment 2
[0024] First, poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) was sprayed on a 1×1cm 2 A thin film is formed on the surface of a silicon wafer with a silicon dioxide layer attached on the surface, and the thickness of the film is 20nm.
[0025] Polymethyl methacrylate (PMMA) was spin-coated on the surface of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) film, and the film thickness of PMMA was controlled to be 35nm. Nanoimprinting was performed on the PMMA surface, the imprinting time was 5min, the imprinting pressure was 40Bar, and the imprinting temperature was 160°C. The imprinting template was a micron-sized silicon template (strip height 500nm, strip width 3μm, and strip spacing 1μm).
[0026] After imprinting, a PMMA double-ridge structure with a size smaller than that of the template is obtained. Then utilize plasma etching technique to transfer PMMA structure to poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) surface, etching cond...
Embodiment 3
[0028] First, poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) was sprayed on a 1×1cm 2 A thin film is formed on the surface of a silicon wafer with a silicon dioxide layer attached on the surface, and the thickness of the film is 20nm.
[0029] Polymethyl methacrylate (PMMA) was spin-coated on the surface of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) film, and the film thickness of PMMA was controlled to be 35nm. Nanoimprinting was performed on the PMMA surface, the imprinting time was 5min, the imprinting pressure was 40Bar, and the imprinting temperature was 160°C. The imprinting template was a micron-sized silicon template (strip height 500nm, strip width 3μm, and strip spacing 1μm).
[0030] After imprinting, a PMMA double-ridge structure with a size smaller than that of the template is obtained. Then utilize plasma etching technique to transfer PMMA structure to poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) surface, etching cond...
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