A speed-up method for image template optimization

Abstract

The present invention provides an image template optimization speed-up method, which comprises the following steps: select a Han's invisible cutting machine, and establish two kinds of chip parameter files, the difference between the two kinds of parameter files is that the second image template is different; the parameter file A is 4 Electrode 2 cutting line template, build the second image template according to the original template creation method; parameter file B is 2 electrodes 1 cutting line template, build the second side image template according to the new template establishment method; After finishing the first side of the chip, the table rotates to the second side, and adopts the 2-electrode 1-cut template method to quickly and accurately locate the image of the second side, effectively shortening the scribing time. The present invention adopts the laser cutting machine table 2 electrodes 1 cutting line template method, which reduces the template matching time and increases the matching success rate.

Description

technical field [0001] The invention relates to the technical field of LED chips, in particular to an image template optimization speed-up method. Background technique [0002] The manufacturing process of LED chips: epitaxial wafer→cleaning→plating transparent electrode layer→transparent electrode pattern lithography→corrosion→remove glue→platform pattern lithography→dry etching→glue removal→annealing→SiO2 deposition→window pattern lithography → SiO2 corrosion → glue removal → N pole pattern photolithography → pre-cleaning → coating → stripping → annealing → P pole pattern photolithography → coating → stripping → grinding → cutting → chip → finished product test → sorting → appearance test → marking into library. [0003] The production process of the epitaxial wafer is very complicated. After the epitaxial wafer is displayed, the next step is to make electrodes (P pole, N pole) on the LED epitaxial wafer, and then start to cut the LED epitaxial wafer with a laser machine ...

AI Technical Summary

Problems solved by technology

[0008] There are the following defects: the image template of Han’s stealth cutting machine is to compare the rectangular image around the cutting line and frame the electrode, and compare the pattern according to the gray scale of the electrode in the image and the image outside the electrode

When comparing the image templates on the second side, the cutting marks are different, which seriously affects the efficiency of image template comparison