Discharge-excited gas laser and operating method thereof
A technology of gas lasers and lasers, which is applied to parts of gas lasers, lasers, laser parts, etc., can solve problems such as glass pollution, and achieve the effect of convenient operation and stability
Active Publication Date: 2019-09-27
NORTHWEST INST OF NUCLEAR TECH
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Problems solved by technology
[0003] In order to solve the problem of contamination of the window glass of the discharge-excited gas laser, the invention provides a discharge-excited gas laser
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[0034] Such as figure 1 In the discharge-excited gas laser, the laser body 1 adopts a stainless steel metal frame with a size of 700mm×180mm×80mm, and a nylon plate is installed on one side as the laser high-voltage connection terminal. Two light windows 2 are respectively installed at both ends of the laser, and form a laser cavity together with the laser body. The discharge pump source 5 is connected to the nylon board and is used to provide high voltage to the laser, including a high voltage power supply, an energy storage unit and a discharge control unit. The gas source 7 is a stainless steel gas pressure vessel with a volume of 40L and a maximum pressure of 15MPa. It is filled with laser working gas. The laser gas supply and the light window cleaner share a gas path. The gas flow controller 6 adjusts the working gas flow rate. The cavity pressure maintaining unit 4 is used to maintain the gas pressure and vacuum in the laser chamber, including an adjustable gas valve 8c, ...
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The invention discloses a discharge excitation gas laser and an operation method thereof. The laser comprises a laser main body, a discharge pumping source, a resonant cavity, a light window, a gas source, and an in-cavity pressure maintaining unit. The light window consists of a light window cleaner and a window. The light window cleaner is based on the gas turbulent flow energy dissipating principle, and comprises an energy dissipating box, a metal gas pipe, and a gas flow controller. When the discharge excitation gas laser operates, the gas source continuously provide laser working gas for the light window cleaner at a certain flow rate, and forms a turbulent flow in the laser light window, thereby reducing the kinetic energy of discharge particles in flying to the window, enabling the discharge particles not to reach and attach to the inner surface of window glass, and protecting the light window of the laser from being polluted. The inputted gas is discharged from the laser cavity through the in-cavity pressure maintaining unit, and the internal gas pressure of the laser cavity remains constant.
Description
Technical field [0001] The invention relates to the technical field of discharge excited gas lasers, in particular to a discharge excited gas laser and an operating method thereof. Background technique [0002] Discharge-excited gas lasers form laser output through high-voltage discharge-excited gas media, and have a wide wavelength coverage. It is an important coherent radiation source and is widely used in scientific research and industrial production. The working voltage of this type of laser is as high as tens of thousands of volts. During the discharge process, a large number of particles are generated due to the ablation of materials such as electrodes. These particles are splashed around under the action of the discharge shock wave, and some particles will reach the laser window and adhere to the surface of the window glass. Serious pollution of the window glass, reducing its laser transmittance, causing the laser output energy to continue to decrease, and resulting in a s...
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IPC IPC(8): H01S3/034H01S3/03H01S3/08
Inventor 黄珂黄超马连英易爱平安晓霞李高鹏
Owner NORTHWEST INST OF NUCLEAR TECH