A calibration device and method for a vacuum sputtering coating mask plate of a quartz crystal oscillator
A quartz crystal and vacuum sputtering technology, which is applied in sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve problems such as difficulty, poor accuracy, and electrode misalignment, so as to reduce labor intensity and improve calibration Efficiency, compact effect
Inactive Publication Date: 2019-07-12
ECEC RAKON CRYSTAL CHENGDU
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Problems solved by technology
The current calibration method mainly uses manual visual calibration under a high-power microscope. Due to the small size of the product electrode, it is necessary to manually align the upper and lower mask plates very accurately during the operation process. This process is difficult and requires skilled personnel to operate. , in short, the existing technology has shortcomings such as poor accuracy and poor repeatability, which will cause defects such as misalignment of electrodes, seriously affecting product quality and production efficiency
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Embodiment Construction
[0020] The present invention will be further described below in conjunction with accompanying drawing, protection scope of the present invention is not limited to the following:
[0021] Such as Figure 2~5 Shown, a kind of calibration device of quartz crystal oscillator vacuum sputtering coating mask plate, it comprises base plate 5, positioning plate 6 and correction plate 7, described positioning plate 6 is fixed on the top of base plate 5, and positioning plate 6 passes through Screw 15 is threadedly connected on the bottom plate 5, and positioning plate 6 is vertically arranged, and four positioning columns 8 are arranged in sequence from front to back on the right end surface of positioning plate 6, and the section of positioning column 8 is triangular, and the top surface of described bottom plate 5 On and on the right side of the positioning plate 6 are provided with a groove, a first waist hole 9 and a second waist hole 10, the first waist hole 9 is located at the rea...
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The invention discloses a device for calibrating a vacuum sputtering film-plating mask plate of a quartz crystal oscillator. The device comprises a bottom plate (5), a positioning plate (6) and a correcting plate (7); the positioning plate (6) is fixed to the top of the bottom plate (5) and is arranged longitudinally; the section of the positioning plate (6) is triangular; the correcting plate (7) is placed on the bottom plate (5) and covers a waist-shaped hole and an electromagnet (11); two V-shaped clamping grooves (12) are formed in the edge of the correcting plate (7); the device further comprises a first positioning rod (13) and a second positioning rod (14); the lower end part of the first positioning rod (13) runs through the correcting plate (7) and is propped against the internal part of a second waist-shaped hole (10); the outer diameter of each positioning rod is smaller than the width of the waist-shaped hole. The invention further discloses a calibration method. The device and the method have the beneficial effects of compact structure, capabilities of improving calibration efficiency and reducing labor intensity, and simplicity in operation.
Description
technical field [0001] The invention relates to the technical field of calibration of upper and lower mask plates, in particular to a calibration device and method for a vacuum sputtering coating mask plate of a quartz crystal oscillator. Background technique [0002] Quartz crystal oscillator is a high-precision and high-stability oscillator, which is widely used in telecommunication, satellite communication, mobile phone system, global positioning system (GPS), navigation, remote control, aerospace, high-speed computer, precision meter Measuring instruments and consumer electronics products. Because of its high frequency stability, it has always occupied an important position in the field of electronic technology. In recent years, with the development of modern science and technology, new requirements are constantly put forward for the size, quality and stability of quartz crystal oscillators. As the size of quartz crystal oscillators decreases and the communication indu...
Claims
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IPC IPC(8): C23C14/04
CPCC23C14/042
Inventor 李万辉
Owner ECEC RAKON CRYSTAL CHENGDU