Fingerprint resistant film with high abrasion property for TFT-LCD (Thin Film Transistor-Liquid Crystal Display)
A technology of high wear resistance and anti-fingerprint film, applied in the field of TFT-LCD, can solve the problems of high surface smoothness of SiO2 buffer layer, limit the adhesion of anti-fingerprint film coating, etc., so as to improve the adhesion of coating and improve anti-fingerprint performance. Effect
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[0016] Embodiment A kind of high abrasion resistance anti-fingerprint film that is used for TFT-LCD display screen, comprises the modified silicon dioxide buffer layer that vacuum evaporation is attached to TFT-LCD glass substrate surface and vacuum evaporation is attached to modified silica Perfluoropolyether film layer on the surface of the silicon buffer layer.
[0017] A preparation method for a high wear resistance anti-fingerprint film layer for a TFT-LCD display, comprising the following steps:
[0018] (1) Put the clean TFT-LCD glass substrate into the PECVD deposition chamber, and bombard the TFT-LCD glass substrate with O2 and Ar glow discharge to activate the surface of the TFT-LCD glass substrate;
[0019] (2) SiO2 is formed by high-temperature cracking of siloxane, vacuumed to a pressure of 5.0×10-3mbar, and then filled with O2 with a gas flow rate of 500sccm and silicone oil of 100sccm until the pressure in the vacuum chamber is 1.0×10-4mbar, and the intermediate...
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