A kind of preparation method of arrayed carbon nano film
A carbon nanotube film and array technology is applied in the field of low-temperature preparation of arrayed carbon nanotube films, and can solve problems such as conditions restricting the application field of arrayed carbon nanotube films, inability to prepare arrayed carbon nanotube films, and the like.
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[0026] The embodiment of the present invention discloses a method for preparing an arrayed carbon nanotube film, comprising the following steps:
[0027] A), the substrate is placed in the metal mesh cover on the negative electrode plate in the cavity of the PECVD equipment, and two catalyst metal plates stacked in sequence are placed above the metal mesh cover;
[0028] B), feed the reaction gas into the cavity of the PEVCD device, turn on the power supply after heating, and obtain a catalyst film on the surface of the substrate after the reaction;
[0029] C), heating the cavity of the PEVCD device, feeding carbon source and carrier gas, turning on the power supply, and obtaining arrayed carbon nanotube film on the surface of the substrate after reaction.
[0030] The present application provides a method for preparing an arrayed carbon nanotube film. The method increases the density of the plasma in the PECVD chamber and uses high-energy plasma to bombard the metal catalyst...
Embodiment 1
[0041] Step 1: Provide a Si substrate, place it on the lower base plate of the PECVD equipment, and then place a metal mesh cover on top of it. There are two metal sheets above the metal mesh cover, the lower layer is stainless steel, and the upper layer is nickel. The distance between the two metal plates is 1cm;
[0042] Step 2: Close the reaction chamber, and use a vacuum pump to make the back-bottom air pressure in the chamber reach 10 -4 Pa. Introduce argon and hydrogen gas, and heat the chamber. When the temperature in the chamber reaches 450°C, turn on the power supply, and set the power to 600W. The electric field makes the gas in the chamber excited into a plasma state, and controls the air pressure in the reaction chamber. , so that a hollow cathode effect is generated between the thin metal plates, the catalyst particles are excited, and the catalyst nano-film is formed on the surface of the sample. In this example, the flow rate of argon gas was 50 sccm, the flow...
Embodiment 2
[0046] Steps 1, 2, and 4 of this implementation are basically the same as in Example 1, the difference is that in step 3, argon and hydrogen are passed into the cavity, and the flow rates are respectively 50 sccm and 30 sccm, while 5 sccm of acetylene is fed into, and the power supply is adjusted. The temperature is reduced to 30W, the reaction temperature is 500° C., and the reaction time is 20 minutes. The thickness of the prepared carbon nanotube film is about 600 nm, and the diameter of the tube wall is about 20-50 nm. The SEM photo of the arrayed carbon nanotube film prepared in this embodiment is as follows Figure 4 shown.
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