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Antifouling substrate and preparation method thereof

A substrate and antifouling technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., can solve problems such as poor surface wear resistance, poor sample surface wear resistance, and difficulty in maintaining the original morphology of the sample surface. Large investment in equipment, poor surface wear resistance, and difficulty in light interference and reflection

Inactive Publication Date: 2017-12-15
CHAOZHOU THREE CIRCLE GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to make the samples have anti-fouling function, superhydrophobic coatings are mostly prepared on the surface of the samples, but the samples prepared in this way have the problem of poor surface wear resistance, and it is difficult to maintain the original shape of the sample surface after repeated friction
In order to make the surface of the sample wear-resistant, in the traditional preparation process, the convex array is usually implanted on the surface of the substrate through a specific process, and the convex array forms an interface bond with the substrate. After repeated friction, the convex array is easily removed from the substrate. Surface peeling, which easily leads to poor wear resistance of the sample surface

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  • Antifouling substrate and preparation method thereof
  • Antifouling substrate and preparation method thereof
  • Antifouling substrate and preparation method thereof

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preparation example Construction

[0050] attached figure 1 It is a flowchart of an embodiment of the preparation method of the anti-fouling substrate of the present invention, specifically, the preparation method of the anti-fouling substrate of the present invention includes the following steps:

[0051] (1), plate a layer of the first inorganic oxide layer on the substrate surface after cleaning;

[0052] (2), forming a metal layer or a second inorganic oxide layer on the surface of the first oxide layer;

[0053] (3) heat-treating the substrate with the metal layer or the second inorganic oxide layer obtained in step (2) to obtain a substrate with metal particles or second inorganic oxide particles;

[0054] (4), the base that step (3) gained has metal particles or the second inorganic oxide particles is etched for the first time, and then the substrate template after etching is cleaned, and has the first inorganic oxide boss 1 base;

[0055] (5), performing a second etching on the first inorganic oxide ...

Embodiment 1

[0060] An embodiment of the antifouling substrate of the present invention, the base material of the antifouling substrate is silicon dioxide, the coating is perfluorodecyltriethoxysilane, the average height of the boss is 80nm, and the convex The average diameter of the mesas is 100 nm, and the ratio of the average diameter of the mesas to the average spacing between adjacent mesas is 4.

[0061] The preparation method of the antifouling substrate described in this embodiment comprises the following steps:

[0062] (1) Clean the substrate with a cleaning agent, then clean it with ultrasonic waves for 5 minutes, and then clean it with deionized water for 2 minutes;

[0063] (2), the first inorganic oxide layer is vapor-deposited on the surface of the substrate, and the process parameters of vapor deposition are: the current is 100mA, and the vacuum degree is 5×10 -3 Pa, the thickness of the first inorganic oxide layer is 200nm;

[0064] (3), evaporate a metal layer on the su...

Embodiment 2

[0072] An embodiment of the antifouling substrate of the present invention, the base material of the antifouling substrate is zirconium dioxide, the coating is perfluorodecyltriethoxysilane, the average height of the boss is 100nm, and the convex The average diameter of the mesas is 120 nm, and the ratio of the average diameter of the mesas to the average spacing between adjacent mesas is 1.2.

[0073] The preparation method of the antifouling substrate described in this embodiment comprises the following steps:

[0074] (1) Clean the substrate with a cleaning agent, then clean it with ultrasonic waves for 5 minutes, and then clean it with deionized water for 2 minutes;

[0075] (2), the first inorganic oxide layer is vapor-deposited on the surface of the substrate, and the process parameters of vapor deposition are: the current is 100mA, and the vacuum degree is 5×10 -3 Pa, the thickness of the first inorganic oxide layer is 150nm;

[0076] (3), evaporate a metal layer on t...

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Abstract

The invention discloses an antifouling substrate which comprises a substrate, of which the surface has at least one functional area. A coating is provided on at least a part of the functional area, a plurality of bosses with an average height of 10-2000nm and an average diameter of 10-500nm are arranged on the functional area, wherein the ratio of the average diameter of the bosses to the average distance between adjacent bosses is 0.1-10. The coating is made of hydrophobic material. The invention further discloses a method for preparing the antifouling substrate. The antifouling substrate has the advantages of high dirt resistance and wear resistance performance, and has a lot of choices. The preparation method of the antifouling substrate substantially reduces the preparation cost of bosses with small distances. A boss array structure is etched directly on the surface of the substrate, thereby solving the problem of poor wear-resistance performance of the surface. The etching depth can be controlled to control the appearance of a sample surface. The production cost is low, and mass production of the antifouling substrate is possible.

Description

technical field [0001] The invention relates to an antifouling material, in particular to an antifouling substrate and a preparation method thereof. Background technique [0002] The surface of the antifouling material generally has a hydrophobic surface, and the hydrophobic surface generally refers to a surface whose contact angle between a solid surface and water is greater than 120°. Since the contact area between the hydrophobic surface and the water droplet is very small, the water droplet rolls off the surface very easily. Therefore, the hydrophobic surface not only has the function of self-cleaning, but also has the functions of anti-current conduction, anti-corrosion, waterproof, anti-fog, anti-virus, anti-snow, anti-frost, anti-adhesion, anti-pollution, etc. It has broad application prospects in fields such as biomedicine, daily necessities and packaging, transportation tools, and microanalysis. [0003] In order to make the samples have anti-fouling function, sup...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/13H01L23/14H01L21/02H01L21/033
CPCH01L21/02112H01L21/0334H01L23/13H01L23/14
Inventor 邱基华
Owner CHAOZHOU THREE CIRCLE GRP