Upper cladding growing technique used for arrayed waveguide grating wafer production

Abstract

The invention discloses an upper cladding growing technique used for arrayed waveguide grating wafer production. Flame hydrolysis deposition equipment is used, and an upper cladding of a wafer is manufactured through a fractional-precipitation method. The technique comprises the following steps that a, an arrayed waveguide grating upper cladding is subjected to primary deposition, twelve layers ofcovering deposition powder is adopted, and the deposition thickness is 8-10 microns; b, then a wafer is directly put into an annealing furnace to be annealed, and the annealing heating speed is increased; c, afterwards, the wafer is taken out of the annealing furnace, the arrayed waveguide grating upper cladding is deposited again , and the deposition thickness is 8-10 microns; and d, the wafer subjected to two times of deposition is put into the annealing furnace to be annealed again, and the upper cladding with the thickness being 16-20 microns is finally obtained. The upper cladding groovefilling property is good, melting is complete, and the situation of difficult decomposition or uneven melting is not liable to occur. Meanwhile, the standards can be reached, the proper refractive rate is achieved, and the TE / TM difference is decreased to the minimum.

Description

technical field [0001] The invention belongs to the technical field of wavelength division multiplexing, and relates to an arrayed waveguide grating, in particular to an upper cladding growth process for arrayed waveguide grating wafer production. Background technique [0002] Arrayed waveguide grating (abbreviated as AWG) is one of the key devices of wavelength division multiplexing technology. It has low propagation loss and high coupling efficiency with optical fiber. It is considered to be a new type of wavelength division multiplexing device with the most development prospects. In the production of AWG wafers, the upper cladding layer is an important part. We choose the flame hydrolysis deposition equipment (abbreviated as FHD) which has a fast film forming speed and can produce thick films. However, in the process of making the upper cladding layer, due to the high doping amount of boron and phosphorus, it is extremely sensitive to temperature. If the temperature is sl...

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Problems solved by technology

Therefore, the current process of depositing the upper cladding layer is poorly controllable, prone to component decomposition or uneven melting

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