A kind of plane parallelism measuring device and measuring method
A technology of plane parallelism and measuring device, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems of untestable parts and irregular parts cannot be measured, and achieves the effect of strong practicability and wide application.
Active Publication Date: 2020-05-05
LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC
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Problems solved by technology
[0005] Both testing methods have limitations. Optical testing cannot test opaque parts. Mechanical testing is a contact measurement. It is not suitable for some precision optical components, and sometimes it cannot measure irregular parts.
Method used
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[0023] Now in conjunction with embodiment, accompanying drawing, the present invention will be further described:
[0024] The equipment used in the rapid test method for plane parallelism provided in this embodiment includes: two autocollimating collimator and display equipment, and one adjusting and fixing bracket. The schematic diagram of the device used in the rapid test method of plane parallelism is as follows: figure 1 As shown, the schematic diagram of the reflection imaging optical path of the collimator is as follows figure 2 As shown, the test optical path is shown in Figure 3, and the position relationship of the cross image is as follows Figure 4 shown.
[0025] The positional relationship is:
[0026] The adjusting bracket 3 is placed between the first self-collimating collimator 1 and the second self-collimating collimating light pipe 2, and the first self-collimating collimating light pipe 1 and the second self-collimating collimating light pipe 2 are arra...
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The invention relates to a plane parallelism measuring device and measuring method. The parallelism can be quickly and accurately determined according to the position relationship between two auto-collimation parallel light pipes and a measured element. The method is applicable to all elements needing plane parallelism test. Glass can be directly tested, and other non-reflective materials can be tested by fitting two high-precisions mirrors only. The method has a wide range of application and high practicability. The quick plane parallelism measuring method provided by the invention is applicable to all elements needing plane parallelism test. Glass can be directly tested, and other non-reflective materials can be tested by fitting two high-precisions mirrors only. The method has a wide range of application and high practicability. Measurement is carried out in a non-contact manner. The parallelism can be quickly and accurately determined.
Description
technical field [0001] The invention relates to a plane parallelism measuring device and a measuring method, which are used for the plane parallelism measuring device of glass plates or structural parts in optical processing and mechanical processing. Background technique [0002] In the field of optical processing and mechanical processing, it is often necessary to process flat glass such as optical windows, optical filters, flat mirrors and other components. In mechanical processing, a type of high-precision structural parts will also be processed, which has an impact on the parallelism between the parts. Strict requirements, such as the optical window directly affecting the parallelism of the optical axis of the sensor, require an accurate measurement of the parallelism between the two used surfaces. [0003] The existing debugging methods are mainly divided into two types, one is optical testing, through testing with an autocollimated light tube, the light tube emits par...
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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 孔小辉李安然郑媛
Owner LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC