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A Surface Acoustic Wave Dual-Axis Tilt Angle Sensing Structure

A surface acoustic wave and dual-axis inclination technology, applied in the field of micro-electromechanical sensing, can solve the problems of inconvenient digital system signal acquisition and processing, and achieve the effect of light weight, small size and easy digitalization

Active Publication Date: 2020-08-04
YANGZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage is that most of the sensing output signals are analog, and it is not convenient to use digital systems for further signal acquisition and processing

Method used

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  • A Surface Acoustic Wave Dual-Axis Tilt Angle Sensing Structure
  • A Surface Acoustic Wave Dual-Axis Tilt Angle Sensing Structure
  • A Surface Acoustic Wave Dual-Axis Tilt Angle Sensing Structure

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Experimental program
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Embodiment Construction

[0026] Such as figure 1 , 2 , 3, and 4, the surface acoustic wave biaxial inclination sensing structure includes a substrate 1, and four surface acoustic wave resonator groups 2-1, 2-2, 2-3, 2-4 The four piezoelectric film regions 3 covering the four surface acoustic wave resonator groups respectively, and the four input / output electrode groups 4-1, 4-2, 4-3, 4-4, four double-terminal fixed support suspension electrodes 8-1, 8-2, 8-3, 8-4, four input signal electrodes 51, 52, 53, 54, four output signal electrodes 61, 62, 63, 64, several ground electrodes 7, four input / output metal via groups and several ground metal vias 10 formed on the substrate 1 and passing through the substrate 1;

[0027] Among the four surface acoustic wave resonator groups 2-1, 2-2, 2-3, and 2-4, the first surface acoustic wave resonator group 2-1 and the second surface acoustic wave resonator group 2-2 are The back of the sheet 1 is arranged front and rear, the first surface acoustic wave resonator...

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Abstract

A surface acoustic wave dual-axis inclination angle sensing structure belongs to the technical field of micro-electromechanical sensing. Fabricate multiple surface acoustic wave resonator groups on the back of the silicon single crystal substrate, fabricate input / output electrode pairs facing each surface acoustic wave resonator on the front of the silicon single crystal substrate, and fabricate a pair of input / output electrode pairs above the array. End-fixed suspension electrodes, according to the inclination angle of the substrate, respectively contact with one of the output electrodes in the corresponding input / output electrode pair array, or contact with the gap between the corresponding input / output electrode pairs, connected or not connected The corresponding surface acoustic wave resonator and the output signal electrode output or do not output the resonance signal of the corresponding resonance frequency, and the biaxial inclination angle of the planar state and the horizontal state of the surface acoustic wave biaxial inclination angle sensing structure substrate can be obtained .

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical sensing, and relates to a sensor structure, in particular to a dual-axis tilt angle sensing structure and method based on a surface acoustic wave resonator. Background technique [0002] Inclination measurement is mainly to measure the inclination of the measured object relative to its horizontal position. The dual-axis inclination sensing device or instrument measures the inclination of the plane where the object to be sensed is located in two directions perpendicular to the horizontal plane. The monitoring and control of the attitude of the measured object, and the measurement of small inclination angles have extremely wide applications in many fields such as precision instrument leveling, aerospace and ship navigation attitude control, satellite communication and radar equipment orientation. [0003] The inclination sensor in the current technology is based on Newton’s law of gr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C9/00B81B7/02
CPCB81B7/02B81B2201/02G01C9/00
Inventor 赵成陈磊张凯杨义军王健
Owner YANGZHOU UNIV
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