Image sensor and preparation method thereof

A technology of image sensors and photosensitive elements, which is applied in the semiconductor field, can solve the problems of poor sensitivity and low photoelectric conversion efficiency of image sensors, and achieve the effects of improving absorption efficiency, photoelectric conversion efficiency, and imaging quality

Inactive Publication Date: 2018-04-13
HUAIAN IMAGING DEVICE MFGR CORP
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Problems solved by technology

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide an image sensor and its prepara

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  • Image sensor and preparation method thereof
  • Image sensor and preparation method thereof

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[0052] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0053] see Figure 1 to Figure 6 . It should be noted that the drawings provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, so the drawings only show the components related to the present invention rather than the number, shape and the number of components in actual implementation. For dimension drawing, the type, quantity and proportion of each component can be changed at will i...

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Abstract

The invention provides an image sensor and a preparation method thereof. The method comprises the steps that a photosensitive element array and a metal interconnection layer on the photosensitive element array are formed on a substrate; the substrate is flipped over, and an isolation trench is formed between adjacent photosensitive elements; a curved mirror is formed on each photosensitive elementto increase the light absorption efficiency of each photosensitive element; each isolation trench is filled to form an isolation structure; and a dielectric layer, a color filter array and a micro lens array are sequentially formed on the isolation structures and the curved mirrors. According to the image sensor and the preparation method thereof, a back-illuminated image sensor structure is used; the curved mirrors and micro-lenses are arranged on the light-receiving surfaces and the light incident surfaces of the photosensitive elements to converge the incident light onto the photosensitiveelements; the light absorption efficiency of the photosensitive elements in the image sensor is improved; the photoelectric conversion efficiency, the random noise and the signal-to-noise ratio of the image sensor are improved; and finally the imaging quality of the image sensor is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an image sensor and a preparation method thereof. Background technique [0002] An image sensor, or photosensitive element, is a device that converts an optical image into an electronic signal, and it is widely used in digital cameras and other electronic optical devices. Early image sensors used analog signals, such as video camera tubes. With the rapid development of digital technology, semiconductor manufacturing technology, and the Internet, the market and the industry are facing the arrival of the era of video, video, and communication integration across various platforms, which outlines the beauty of the daily life of human beings in the future. With its application in daily life, it is undoubtedly a digital camera product, and its development speed can be described as changing with each passing day. In just a few years, digital cameras have developed from hundreds...

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Application Information

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IPC IPC(8): H01L27/146
Inventor 武海亮陈世杰穆钰平黄晓橹
Owner HUAIAN IMAGING DEVICE MFGR CORP
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