Preparation method for metal-metal oxide nanocomposite
A technology of nanocomposite materials and oxides, which is applied in the field of preparation of metal-metal oxide nanocomposite materials, can solve the problems of polluted environment, complex process and long cycle.
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[0029] The invention provides a preparation method of a metal-metal oxide nanocomposite material, comprising the following steps:
[0030] (1) providing a conductive substrate attached with a metal oxide film;
[0031] (2) electron beam irradiation is performed on the metal oxide film on the conductive substrate to obtain metal nanoparticles;
[0032] (3) placing the metal nanoparticles in an oxygen-containing atmosphere, and performing an oxidation reaction to obtain a metal-metal oxide nanocomposite material.
[0033] The present invention first provides a conductive substrate to which a metal oxide thin film is attached.
[0034] In the present invention, the metal oxide thin film is preferably an oxide thin film of Ti, Cr, Mn, Fe, Cu, Co or Ni.
[0035] In the present invention, the metal oxide film is preferably a film with atomic level flatness, the flatness of the metal oxide film is represented by root mean square RMS, and the RMS is preferably 0.1-0.2 nm; the metal ...
Embodiment 1
[0054] (1) A CoO film with a thickness of 18 nm was deposited on a Si(111) substrate by a pulsed laser deposition method; the laser frequency of the pulsed laser deposition method was 5 Hz, and the energy density was 2 J / cm 2 , the target material used is a Co target material with a purity of 99.99%, rotating at a speed of 20deg / s, the deposition atmosphere is an oxygen atmosphere, and the pressure is 2.3×10 -4 Torr, the deposition temperature is room temperature, and the total pulse is 1500p; the obtained CoO film is an atomically flat film;
[0055] (2) Electron beam irradiation is performed on the CoO thin film to obtain metallic Co nanoparticles; the electron irradiation dose of the electron beam irradiation is 6×10 19 / cm 2 , the control acceleration voltage is 17kV, the beam intensity is 2mA, the irradiation temperature is 449~451℃, and the irradiation time is 5min; the size of the conductive substrate is 0.5×0.5mm;
[0056] (3) The metallic Co nanoparticles are placed...
Embodiment 2
[0059] Co-CoO nanocomposites were prepared according to the method described in Example 1, and the electron irradiation dose was increased to 1.8×10 20 / cm 2 , the irradiation time is 15min.
[0060] The resulting composites were characterized using atomic force microscopy, as figure 1 As shown in (b), the average particle size of the obtained composite material was measured to be 30 nm.
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