A large dynamic range, high-precision phase difference method wavefront measuring instrument combined with adaptive optics technology
A large dynamic range, adaptive optics technology, applied in the field of adaptive optics and optical detection, can solve the problem that the wavefront aberration measurement technology cannot simultaneously achieve large dynamic range and high-precision wavefront aberration measurement, and achieve solution convergence The effect of solving sexual problems, improving detection range and success rate, and reducing accuracy requirements
Active Publication Date: 2019-12-03
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0007] The technical problem solved by the present invention is: in view of the insufficiency that various existing wavefront aberration measurement technologies cannot simultaneously realize large dynamic range and high-precision wavefront aberration measurement, an adaptive optics technology combined with phase The new wavefront measuring instrument of the difference wavefront sensor, through the closed-loop correction-measurement system and the multi-channel phase difference constraint method constructed by the present invention, can realize large dynamic range and high-precision wavefront aberration for the point light source system and the extended target at the same time Measurement
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[0027] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0028] like figure 1 As shown, the present invention is a large dynamic range and high-precision phase difference method wavefront measuring instrument combined with adaptive optics technology. The beam conjugate-matching system 5, the second beam splitter 6, the wavefront corrector 7, the phase difference wavefront sensor 8 and the high-performance computing processing system 9 are composed. The light source laser 1 emits an illumination beam, and the parallel light collimation system 2 collimates the illumination beam into a parallel light wave. The first beam splitter 3 reflects the parallel light wave to illuminate the sample 4 to be tested, and the sample 4 to be tested is reflected back to the sample 4 containing the aberration to be measured. The distorted light wave, the distorted light wave enters the beam conjugate-matching system 5 ...
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The invention discloses an adaptive optical technology-combined large-dynamic-range and high-precision phase difference method wavefront measuring instrument. The adaptive optical technology-combinedlarge-dynamic-range and high-precision phase difference method wavefront measuring instrument is formed by a light source laser, a parallel light collimation system, a beam conjugation-matching system, a wavefront corrector, a phase difference wavefront sensor and a high performance calculating and processing system, wherein the wavefront measuring instrument utilizes the wavefront corrector to introduce multiple groups of accurate known phase difference information into the phase difference wavefront sensor to form multi-channel phase difference wavefront distortion constraints, thus significantly improving the aberration detection range and sensitivity of a traditional phase difference method; and the wavefront measuring instrument utilizes the wavefront corrector, the phase difference wavefront sensor and the high performance calculating and processing system to form an adaptive optical wavefront aberration closed loop correction-measurement system so as to continuously detect the corrected residual aberrations to enable the distortion light wave after phase compensation to finally approach the ideal optical flat light wave step by step while the correcting value of the wavefront corrector is the accurate value of the wavefront aberration to be measured.
Description
technical field [0001] The invention belongs to the field of adaptive optics and optical detection, and specifically relates to a large dynamic range and high-precision phase difference method wavefront measuring instrument combined with adaptive optics technology. Background technique [0002] Optical detection based on wavefront measurement technology is an important development direction in modern optics. The invention of the laser in the 1860s provided a good coherent lighting source for wavefront measurement technology, and the rapid development of electronic technology and computer technology has also promoted the comprehensive application of new technologies in multiple disciplines such as light, mechanics, and electricity. For wavefront measurement, the implementation means and application range of wavefront measurement technology have been greatly expanded. As a non-contact measurement method, wavefront measurement technology has been widely used in physical experi...
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IPC IPC(8): G01M11/02
CPCG01M11/00
Inventor 鲍华饶长辉饶学军朱磊郭有明张兰强孔林钟立波
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI