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Preparation method for diamond coating and preparation device of diamond coating

A technology of diamond coating and preparation equipment, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., and can solve the problems of long coating cycle, high cost, and low diamond growth rate

Active Publication Date: 2018-06-01
FUNIK ULTRAHARD MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, using the hot wire CVD method to prepare diamond coatings, the growth rate of diamonds is low, resulting in long cycle times and high costs for preparing coatings.

Method used

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  • Preparation method for diamond coating and preparation device of diamond coating

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Effect test

Embodiment 1

[0026] The present embodiment provides a kind of preparation method of diamond coating, it comprises the following steps:

[0027] According to the mass ratio of 1:80, under the condition of 50-70°C, dissolving melamine in methanol solution to obtain a mixed solution;

[0028] Under the condition that the hot wire power is 5kW, the hot wire temperature is 2000°C, and the pressure is 2KPa, methane and hydrogen are used as the reaction gas source, and the reaction gas source and the mixed solution are simultaneously passed into the deposition chamber, and the thermal Diamond was deposited on the surface of the substrate for 8 hours by silk vapor deposition to obtain a diamond coating, wherein the volume fraction of methane in the reaction gas source was 1.5%.

Embodiment 2

[0030] The present embodiment provides a kind of preparation method of diamond coating, it comprises the following steps:

[0031] According to the mass ratio of 1:140, the melamine is dissolved in the ethanol solution under the condition of 50-70° C. to obtain a mixed solution;

[0032] Under the condition that the power of the hot wire is 7kW, the temperature of the hot wire is 2500°C, and the pressure is 4KPa, methane and hydrogen are used as the reaction gas source, and the reaction gas source and the steam of the mixed solution are simultaneously passed into the deposition chamber, Diamond is deposited on the surface of the substrate for 12 h by hot wire vapor deposition to obtain a diamond coating, wherein the volume fraction of methane in the reaction gas source is 3%.

Embodiment 3

[0034] The present embodiment provides a kind of preparation method of diamond coating, it comprises the following steps:

[0035] According to the mass ratio of 1:100, under the condition of 50-70°C, dissolving melamine in methanol solution to obtain a mixed solution;

[0036] Under the condition that the power of the hot wire is 6kW, the temperature of the hot wire is 2300°C, and the pressure is 3KPa, methane and hydrogen are used as the reaction gas source, and the reaction gas source and the steam of the mixed solution are simultaneously passed into the deposition chamber, Diamond is deposited on the surface of the substrate for 10 h by hot wire vapor deposition to obtain a diamond coating, wherein the volume fraction of methane in the reaction gas source is 2%.

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Abstract

The invention provides a preparation method for a diamond coating. The preparation method comprises the following steps that melamine is dissolved in an alcoholic solution, and a mixed solution is obtained; and methane and hydrogen are used as reaction gas sources, the reaction gas sources and the mixed solution are pumped into a deposition chamber simultaneously, diamond is deposited on the surface of a matrix through a hot-filament vapor deposition method, and the diamond coating is obtained. According to the preparation method, melamine and the alcoholic solution are introduced into vapor deposition, melamine and alcohol are decomposed to form NH-3 and N+, the growth rate of diamond can be effectively increased, amorphous carbon deposited on hot filaments can be oxidized, the hot filament heating efficiency is improved, and the service life of the hot filaments is prolonged. Meanwhile, the invention provides a preparation device of the diamond coating. The device is simple in structure, reasonable in design and suitable for industrial application.

Description

technical field [0001] The invention belongs to the field of superhard material coatings, and in particular relates to a method for preparing a diamond coating and a preparation device thereof. Background technique [0002] With the development of high technology, materials with lighter weight and better performance are required in the fields of automobile, aviation and spaceflight. These materials often have the characteristics of high hardness, high strength and wear resistance, such as non-ferrous metal alloys, carbon fiber-based reinforced materials, ceramic materials, etc. However, ordinary cemented carbide, polycrystalline cubic boron nitride (CBN) and polycrystalline diamond (PCD) cutting tools have many deficiencies in the process of cutting the above materials, so there is an urgent need for a tool with high cutting strength, long life, and durability. For tools with high abrasiveness and high machining accuracy, the emergence of diamond-coated tools can solve the ...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/448C23C16/02
CPCC23C16/0227C23C16/271C23C16/4481
Inventor 许立李丙文马宁
Owner FUNIK ULTRAHARD MATERIAL
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