Analog controller for radiofrequency power supply

Abstract

The invention relates to an analog controller for a radiofrequency power supply. The analog controller for the radiofrequency power supply comprises a main control board, as well as an SMPS, a controlcomponent, an external input port, a control port, an alarm indicator, a state switch, a monitoring port, monitoring equipment, terminal equipment INTERLOCK and a meter head display which are connected with the main control board, wherein the monitoring equipment is connected with the monitoring port. The analog controller for the radiofrequency power supply, provided by the invention, can achieve easy control, needs less equipment, can record an analog quantity detection result in real time, can monitor a fed-back state in real time, can provide an accurate detection result, can convenientlymonitor the operation and output stability performance of the radiofrequency power supply in real time so as to provide a basis for judging the overall performance of the radiofrequency power supply,and can meet needs of practical application very well.

Description

technical field [0001] The invention relates to a radio frequency power analog controller. Background technique [0002] RF power supplies have been widely used in the fields of semiconductor chips, liquid crystal panels, solar energy, and LED manufacturing. RF power supply is one of the important parts in the whole manufacturing equipment. However, almost all equipment manufacturers are foreign companies, and they impose a strict technical blockade on equipment control. As a result, many industries only use equipment and do not know how to control it. Furthermore, due to the high operating frequency and high output power of the RF power supply, the harsh operating environment is prone to failure and damage. Especially for failure analysis and maintenance of RF power supply, it is necessary to understand and master the control and testing methods. Therefore, in this case, operators and maintenance personnel are required to control the RF power supply conveniently, complete...

AI Technical Summary

Problems solved by technology

However, the use of artificially satisfying INTERLOCK, through external power supply and mechanical switch control, multimeter detection and output analog to control the RF power supply, will lead to complex control, a lot of equipment required, and analog detection cannot be recorded and fed back in real time. Many problems such as inability to monitor in real time and inaccurate test results

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