Non-contact double-axis tilt control device based on voice coil motors
A technology of voice coil motor and tilt control, applied in the direction of using feedback control, etc., to achieve the effect of easy integration, obvious effect and simple structure
Active Publication Date: 2018-06-29
WUHAN INST OF PHYSICS & MATHEMATICS CHINESE ACADEMY OF SCI
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Problems solved by technology
The voice coil motor is used as the actuator, and it also has excellent performances such as high acceleration, high speed, and quick response. These characteristics are also difficult to achieve with contact devices.
Method used
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[0043] Below in conjunction with accompanying drawing and embodiment this device is described in detail:
[0044] 1. The structure of this device
[0045] 1. Overall
[0046] Such as figure 1 , diagram 2-1 , Figure 2-2 , the device includes a base 00;
[0047] A horizontal water table 10, an inclination measurement module 20, an amplification and filtering module 30, a current amplifier 40 and a voice coil motor 50 are provided;
[0048] The horizontal platform 10 includes a circular plate 12 connected up and down and two active vibration isolation tables 11;
[0049] The inclination measurement module 20 includes an inclination sensor 21, a reference voltage 22, an adder 23 and a two-dimensional horizontal adjustment frame 24;
[0050] The amplification and filter module 30 includes a filter circuit 31 and a non-inverting amplifier 32 connected front and back;
[0051] The voice coil motor 50 includes a connector 51, a strong NdFeB magnet 52, an I-shaped cylinder 53 ...
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The invention discloses a non-contact double-axis tilt control device based on voice coil motors and relates to the technical field of precision machinery and modern control. The device comprises a base and is provided with a horizontal water table, a tilt angle measurement module, an amplification and filtration module, a current amplifier and two voice coil motors, wherein the two voice coil motors are arranged on the left and the right of a round flat plate respectively and form an angle of 90 degrees; a tilt sensor and a reference voltage component are connected with an adder, and the adder, the amplification and filtration module, the current amplifier, the voice coil motors and the horizontal water table are connected sequentially. The device adopts a non-contact design, the vibration isolation effect of a controlled table is not affected while tilt control is performed; the response speed is high; the device has general applicability in principle. The device is simple in structure, has a remarkable tilt change pressing effect and can be widely applied to tilt-sensitive systems such as pose calibrating, crane arm angle control and the like. Moreover, the device adopts the non-contact structure and can be applied to precision measurement experiments requiring vibration isolation.
Description
technical field [0001] The invention relates to the technical fields of precision machinery and modern control, in particular to a non-contact dual-axis tilt control device based on a voice coil motor. Background technique [0002] With the development of precision measurement and precision machinery, how to reduce the inclination angle of the horizontal platform for placing equipment and experimental devices is very important. For example, in the laser precision interferometry experiment, the inclination angle change of the order of 100mrad (micro radian) will have a great impact on the measurement results. In industrial production, small angle changes will cause large deviation distances for long-baseline processing and inspection equipment. [0003] The actuators in the current tilt control devices mostly adopt contact structures, such as air springs and the like. Because these devices are in contact with the horizontal platform through a medium (such as compressed air)...
Claims
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IPC IPC(8): G05D3/12
CPCG05D3/12
Inventor 张涛李刘锋陈李生毕进支允琳
Owner WUHAN INST OF PHYSICS & MATHEMATICS CHINESE ACADEMY OF SCI