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A non-contact coordinate measuring machine

A coordinate measuring machine, non-contact technology, applied in the field of optical detection, can solve problems such as the reduction of positioning accuracy

Active Publication Date: 2020-09-18
SUZHOU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem solved by the present invention is: to solve the problem that the normal direction of the measured point needs to be aligned with the probe when using the existing non-contact coordinate measuring machine to measure, which leads to the problem of reduced positioning accuracy

Method used

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  • A non-contact coordinate measuring machine
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  • A non-contact coordinate measuring machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] as attached figure 2 As shown, a non-contact coordinate measuring machine includes a frame 14, an optical probe, a three-dimensional motion mechanism, a display system 19 and a control system 18, the optical probe is arranged on the three-dimensional motion mechanism, and the three-dimensional motion mechanism Set on the frame, the frame is connected with the control system, and the control system is connected with the display system, wherein the three-dimensional motion mechanism consists of three mutually perpendicular X-axis translation mechanisms 15, Y An axis translation mechanism 17 and a Z-axis translation mechanism 16 are formed, one of which is arranged in a vertical direction, and a position measuring device is arranged on the three-dimensional motion mechanism for recording the amount of position change;

[0018] It is characterized in that: the optical probe is composed of an interference optical path, such as figure 1 As shown, the interference optical pa...

Embodiment 2

[0022] On the basis of the technical solutions of the above-mentioned embodiments, as figure 1 As shown, a non-contact coordinate measuring machine, a small aperture diaphragm 13 is also arranged between the spherical shell lens and the focusing lens. The aperture diaphragm can effectively filter stray light and improve the quality of interference fringes. Such as figure 2 and image 3 As shown, when measuring a high-steep test piece, data acquisition can be completed without aligning the normal direction of the detection point of the test piece with the optical probe.

Embodiment 3

[0024] Embodiment 1 On the basis of the technical solution, a non-contact coordinate measuring machine, the position measurement device provided on the three-dimensional motion mechanism is a grating ruler or a lead zirconate titanate piezoelectric ceramic (PZT) displacement position measurement device.

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PUM

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Abstract

The invention discloses a non-contact coordinate measuring machine, which solves the problem that the normal direction of the measured point needs to be aligned with the probe when the existing non-contact coordinate measuring machine is used for measurement, which leads to the reduction of positioning accuracy; in the Teiman-Green interference optical path Based on the introduction of the spherical shell lens, an interferometric optical probe was successfully built. During measurement, the optical probe is adjusted to focus on a certain point on the measured object, and the measuring beam is reflected back to the optical system by the inner surface of the spherical shell lens, and the measuring beam is split into beams. The reflector is reflected into the CCD image sensor to form interference fringes with the reference beam, and the position measurement device records the position information of the three-dimensional motion mechanism at this time; the adjustment of the three-dimensional motion mechanism sequentially records the position where the image focus of the focusing lens is focused on other points on the measured object Information, the surface shape of the tested piece can be obtained through data processing; the three-dimensional motion mechanism is simplified, the mechanical positioning error is reduced, and high-steep components can be measured.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a three-dimensional contour measuring machine. Background technique [0002] The most commonly used method for three-dimensional surface measurement is three-coordinate measurement. Three-coordinate measurement technology has many advantages such as strong versatility, high degree of automation, and high measurement accuracy, and has been widely used in the fields of machinery and electronics. At present, according to the form of the three-coordinate measuring machine probe, the three-coordinate measuring machine can be divided into a contact three-coordinate measuring machine and a non-contact three-coordinate measuring machine. At present, non-contact three-coordinate measuring machine mainly has two forms: laser point measurement and line laser scanning measurement. For contact CMMs and non-contact laser point measurement CMMs, the measurement process r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
CPCG01B11/2441G01B11/25
Inventor 黄启泰管敏
Owner SUZHOU UNIV