Resonant flow velocity sensor measurement and control device based on hair structure

Abstract

The invention discloses a resonant flow velocity sensor measurement and control device based on the hair structure. The device comprises a resonant hair sensor, two driving measurement and control circuits and an excitation generation circuit. The resonant hair sensor is provided with two sets of signal sensitive electrodes and driving electrodes. Each driving measurement and control circuit comprises a C / V detection circuit, a precision rectification circuit, a filtering and sampling circuit, an FPGA driving control module, a DA driving interface module and a comparator module. The sensitiveelectrodes of the resonant hair sensor are connected with the C / V detection circuit, the precision rectification circuit, the filtering and sampling circuit, the FPGA driving control module and the DAdriving interface module in turn to be inputted to the driving electrodes. The output of the C / V detection circuit is also connected with the comparator module, and the comparator module is connectedwith the FPGA driving control module. The FPGA driving control module is connected with the excitation generation circuit. The amplitude and the frequency are separately processed and controlled so that the interference between the amplitude and the frequency can be avoided and the measurement accuracy can be effectively enhanced.

Description

technical field [0001] The invention relates to a hair structure-based resonant flow velocity sensor measurement and control device, which belongs to the technical field of micro-electromechanical system measurement and control. Background technique [0002] Biological inspiration is often used in engineering to design and manufacture MEMS sensor systems. Hair-like structures have been widely adopted to obtain various functions: air flow measurement, temperature measurement, vibration measurement, etc. Hair sensors have many desirable properties, including high aspect ratios, large surface areas, and customizable material properties. [0003] When acceleration and flow velocity act on the hair of the hair sensor, the resonant hair sensor converts the measured value into a resonant frequency, which has the advantages of high sensitivity, wide dynamic range, and strong anti-interference ability. Existing flow rate sensors adopt thermal or piezoresistive structures, and the m...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, provide a hair structure-based resonant flow sensor measurement and control device, and solve the problem that the current flow sensor generates a specific flow rate through the constant air chamber, which is limited by the sensor itself. Measurement accuracy, and the problem that high-precision micro-flow velocity is not easy to obtain

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