Multi-layer type multi-stage array pressure sensor

Abstract

The invention discloses a multi-layer type multi-level array pressure sensor. The multi-layer type multi-level array pressure sensor comprises a pressure sensing unit; a bottom layer, a lower separation layer, a middle layer, an upper separation layer and a top layer are closely laminated from bottom to top so as to form the pressure sensing unit; the upper surface of the bottom layer is providedwith three bottom-layer electrodes which are evenly spaced along a circumferential direction; three through holes corresponding to the three bottom-layer electrodes are formed in the lower separationlayer and the upper separation layer; the lower surface of the middle layer is provided with three middle-layer lower electrodes respectively corresponding to the three bottom-layer electrodes; the upper surface of the middle layer is provided with three middle-layer upper electrodes respectively corresponding to the three bottom-layer electrodes; and the lower surface of the top layer is providedwith three top-layer electrodes respectively corresponding to the three bottom-layer electrodes. According to the multi-layer type multi-level array pressure sensor of the invention, a plurality of pressure thresholds can be detected in the vertical direction of one sensing unit, and therefore, detection efficiency can be improved, manufacturing cost and difficulty can be reduced, and the practicability of the sensor is enhanced.

Description

technical field [0001] The invention relates to a sensing device, in particular to a multi-layer multi-level array pressure sensor. Background technique [0002] The flexible pressure sensor is a flexible electronic device used to sense the force on the surface of an object. It can be attached to the surface of various irregular objects and has broad application prospects in the fields of medical health, robotics, and biomechanics. With the development of science and technology, whether the flexible pressure sensor can combine the functions of flexibility and accurate measurement of pressure distribution information has become the focus of attention. [0003] At present, a lot of research has been done on flexible pressure sensors at home and abroad. Most of the flexible pressure sensors are used to detect the continuous force range, and how to realize the high sensitivity, low hysteresis, and robustness of the flexible tactile sensor in the solution environment. High relia...

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Problems solved by technology

[0003] At present, a lot of research has been done on flexible pressure sensors at home and abroad. Most of the flexible pressure sensors are used to detect the continuous force range, and how to realize the high sensitivity, low hysteresis, and robustness of the flexible tactile sensor in the solution environment. High reliability, high loading reliability, high mechanical fatigue strength and high spatial resolution are still a big challenge; on the contrary, there are few discrete flexible pressure sensing devices, and the detection principle is through the conduction of the internal electrodes of the sensor. To detect the pressure threshold, suitable for applications that do not need to measure the continuous measurement range

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