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Physical quantity measurement device and electronic apparatus

一种检测装置、物理量的技术，应用在测量装置、测量加速度、测量仪器组件等方向，能够解决传感器芯片气密性破坏、降低物理量检测装置功能、增大传感器芯片接合面积等问题

Active Publication Date: 2018-08-21
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, in the physical quantity detection device described in Patent Document 1, there is a problem that the bonding area of ​​the sensor chip needs to be increased in order to prevent the sensor chip from falling off.
Therefore, due to the difference in the thermal expansion coefficient between the bonding material such as an adhesive and the sensor chip, thermal stress concentrates on the corner of the sensor chip, and the airtightness of the sensor chip may be damaged, resulting in a decrease in the function of the physical quantity detection device.

Method used

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  • Physical quantity measurement device and electronic apparatus
  • Physical quantity measurement device and electronic apparatus
  • Physical quantity measurement device and electronic apparatus

Examples

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no. 1 approach

[0047] (Physical quantity detection device)

[0048] First, refer to figure 1 and figure 2 , taking the physical quantity detection device 100 for detecting multi-axis physical quantities as an example, the physical quantity detection device of this embodiment will be described.

[0049] figure 1 is a cross-sectional view showing the configuration of the physical quantity detection device according to the first embodiment of the present invention, figure 2 It is an exploded perspective view showing the configuration of the physical quantity detection device. exist figure 2 In FIG. 2 , the shapes and arrangements of the components are mainly shown, and the device cover 60 and wiring are omitted. In each drawing, an X axis, a Y axis, and a Z axis are shown as three axes orthogonal to each other.

[0050] Such as figure 1 and figure 2 As shown, the physical quantity detection device 100 includes: a rectangular plate-shaped metal base 10 parallel to the XY plane; The ...

no. 2 approach

[0086] Next, another preferred example of the physical quantity detection device 100 will be described.

[0087] Figure 8 It is a cross-sectional view showing the configuration of a physical quantity detection device according to a second embodiment of the present invention. in addition, Figure 9 It is an exploded perspective view showing the configuration of the physical quantity detection device of the second embodiment.

[0088] The physical quantity detection device 100a of the second embodiment is characterized by the connection structure between the metal block 130 and the physical quantity detection sensor 40, and its characteristic part is different from the physical quantity detection device 100 of the first embodiment. Therefore, the same reference numerals as those of the first embodiment will be used to describe the same parts except for the parts different from the first embodiment.

[0089] Such as Figure 8 and Figure 9 As shown, the physical quantity de...

no. 3 example

[0094] Next, another preferred example of the physical quantity detection device 100 will be described. Figure 10 is a cross-sectional view showing the configuration of a physical quantity detection device according to a third embodiment of the present invention. Figure 11 It is a perspective view disassembled and showing the configuration of the physical quantity detection device of the third embodiment.

[0095] The physical quantity detection device 100b of the third embodiment is characterized by the connection structure between the metal block 230 and the physical quantity detection sensor 40, and its characteristic part is different from the physical quantity detection device 100 of the first embodiment. Therefore, excluding the parts different from the first embodiment, the same parts as the first embodiment will be described using the same reference numerals.

[0096] Such as Figure 10 and Figure 11 As shown, the physical quantity detection device 100b has: a meta...

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PUM

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Abstract

The invention provides a physical quantity measurement device and an electronic apparatus. The physical quantity measurement device includes a physical quantity measurement sensor and a metal block that is a holding member that includes block surfaces that serve as a plurality of holding portions for holding the physical quantity measurement sensor, and the block surface has a groove formed in a region facing the physical quantity measurement sensor.

Description

technical field [0001] The present invention relates to a physical quantity detection device and electronic equipment including the physical quantity detection device. Background technique [0002] In the past, as a physical quantity detection device, a physical quantity detection device is known, for example, as disclosed in Patent Document 1, a sensor chip (physical quantity detection sensor) that detects any physical quantity of displacement, velocity, and acceleration in one direction of an object to be measured is used. ) are directly pasted on the respective wall parts of the mounting parts having two or more wall parts orthogonal to each other. Since a plurality of sensor chips are directly pasted on the wall portion of the mounting member orthogonal to each other, there is no deviation in the parallelism of each sensor chip in the detection direction, and two or more orthogonal to each other can be measured with high precision. physical quantity. [0003] In additi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P3/00G01P15/00
CPCG01P3/00G01P15/00G01P1/023G01P1/026G01P15/18G01D11/30
Inventor 龟田高弘西尾真次
Owner SEIKO EPSON CORP