A attitude adjustment device for interferometer

Abstract

The invention discloses an attitude adjusting device applied to an interferometer. The device comprises an outer frame and an inner frame. The inner frame and the outer frame are hinged via a first hinge member to realize the rotation of the inner frame in a space. The inner frame is provided with a driving input member which is fixedly connected with the inner frame. The outer frame is provided with an adjusting component which matches the driving input member. The driving input member is driven by the adjusting component to drive the inner frame to realize spatial rotation with the first hinge member as a fixed rotating point. According to the used device, the inner frame is connected with a device whose attitude is to be adjusted; the inner frame and the outer frame are hinged through the first hinge member; the first hinge member serves as a fixed rotation point; the inner frame is connected with the driving input member; the outer frame is provided with the adjusting component which matches the driving input member; force is transmitted to the driving input member through the adjusting component; the driving input member rotates with the first hinge member as the fixed rotating point, so as to drive the inner frame to rotate in the space; and the tilt angle between the device whose attitude is to be adjusted and the optical axis of the interferometer is adjusted, wherein the device is connected with the inner frame.

Description

technical field [0001] The invention relates to the technical field of optical detection, and more specifically, relates to an attitude adjustment device for an interferometer. Background technique [0002] In the process of high-precision optical inspection, the laser interferometer supplemented by the etalon of the corresponding F number is the main equipment for surface inspection of optical components. It is parallel to the optical axis of the light emitted by the interferometer, which greatly reduces the accuracy and feasibility of detection. Therefore, the attitude of the etalon suspended on the interferometer needs to be adjusted online until the interferogram meets the measurement requirements. This requires a suitable attitude fine-tuning device to adjust the attitude of the interferometer etalon. According to the requirements of use, it is only necessary to adjust the two directions of roll and pitch of the etalon in space. Specify the position, need to use the ...

AI Technical Summary

Problems solved by technology

[0007] However, although the general precision mechanical adjustment mechanism can achieve the adjustment requirements of the corresponding dimensions, its overall size is usually large and takes up a lot of space. Sometimes the coupling between dimensions is so severe that repeated adjustments can only achieve the goal and increase the workload. When bearing heavy optical-mechanical components, the adjustment force is large, which increases the difficulty of adjustment. Therefore, the general precision mechanical adjustment mechanism is not very ideal in terms of space saving, adjustment accuracy and ease of use.

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