Method for making standard leakage holes based on defects of graphene itself
A standard leak and graphene technology, applied in chemical instruments and methods, testing of fluid tightness, testing of machine/structural components, etc. Narrow rate range and other issues, to achieve the effect of good controllability of leak rate, low cost and wide leak rate range
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Embodiment 1
[0029] In this example, the method for making a standard leak by utilizing the defects of graphene itself is as follows:
[0030] 1. Take a piece of copper foil 2 and put it into a vacuum tube furnace. First, use methane and hydrogen to clean the pipeline in the vacuum tube furnace, vacuumize it to about 10Pa, then raise the temperature to 1020°C for half an hour, heat preservation and annealing for 60 minutes, and control the hydrogen and hydrogen. The content of methane is used to grow graphene, and finally, after the growth is completed, the temperature is rapidly lowered, and after the temperature is cooled, a single layer of graphene is deposited on the surface of copper foil to obtain a single layer of graphene 1;
[0031] 2. Evenly spin-coat polymethyl methacrylate 3 on the prepared graphene. The homogenizer first slows down at 800r / s for 5s, then fast at 3000r / s for 10s, and measures the thickness of polymethyl methacrylate 355nm.
[0032] 3. Take a silicon wafer, use...
Embodiment 2
[0038] The operation process of this example is basically the same as Example 1. The difference is that after step 5 is completed, a layer of graphene / polymethyl methacrylate is transferred on it, and a double-layer graphene / polymethyl methacrylate is obtained after drying. The structure of methyl acrylate. Compared with the single layer, it is found that the flow rate of the double layer is about an order of magnitude larger than that of the single layer, the test pressure ranges from 1000Pa to 7000Pa, and the minimum leak rate is negative eight orders of magnitude.
Embodiment 3
[0040] The operation process of this example is basically the same as that of Example 1. The difference is that after step 5 is completed, the second sheet of graphene is cleaned and spread on the first layer, baked for about 20 minutes, then removes the polymethyl methacrylate, and then repeats Repeat the above steps until five layers are covered. Note that the polymethyl methacrylate on the fifth layer is not removed, just dry it. Compared with the structure of bilayer graphene / polymethyl methacrylate, it is found that the flow rate of the five layers is about two orders of magnitude larger than that of the two layers, the test pressure ranges from 1000Pa to 7000Pa, and the minimum leak rate is negative six orders of magnitude.
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