Perovskite optoelectronic device based on tunneling effect and preparation method thereof
A technology of photoelectric devices and tunneling effect, which is applied in the field of microelectronics, can solve the problems of weak photocurrent, reduced separation, low sensitivity and efficiency of photoelectric devices, etc., and achieve the goal of increasing photocurrent, reducing recombination, and easy mass production Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0044] See figure 1 , figure 1 It is a flow chart of a method for manufacturing a perovskite photoelectric device based on the tunneling effect provided by an embodiment of the present invention. The manufacturing method of the perovskite photoelectric device based on the tunneling effect in this embodiment includes the following steps:
[0045] S1: select Si substrate;
[0046] Specifically, intrinsic Si with a thickness of 400 μm is selected as the Si substrate. The Si substrate functions to support the entire photodetector structure.
[0047] S2: depositing a metal material on one surface of the Si substrate to form a lower electrode;
[0048] Specifically, the S2 includes:
[0049] S21: Use argon gas with a purity of 99.999% by mass to clean the cavity of the magnetron sputtering equipment for 5 minutes and vacuum to 6×10 -4 -1×10 -3 Pa;
[0050] S22: Use argon gas with a purity of 99.999% as a sputtering gas into the sputtering chamber;
[0051] S23: When the vacuum degree is 6×10 ...
Embodiment 2
[0080] See figure 2 , figure 2 This is a schematic structural diagram of a perovskite photoelectric device based on the tunneling effect provided by an embodiment of the present invention. The perovskite photoelectric device based on the tunneling effect of this embodiment has a multilayer structure, which includes an upper electrode 1, a light absorption layer 2, a tunneling layer 3, a substrate 4, and a lower electrode 5 in order. In this embodiment, the upper electrode 1 uses Au material; the light absorption layer 2 uses CH 3 NH 3 PbI 3 Material; tunnel layer 3 uses HfO 2 Material; the substrate 4 uses intrinsic Si; the lower electrode 5 uses Al material. The perovskite photoelectric device based on the tunneling effect of this embodiment can be prepared by the preparation method described in the first embodiment.
[0081] Specifically, the manufacturing method of the perovskite optoelectronic device based on the tunneling effect in this embodiment includes:
[0082] Step a:...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


