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Electrostatically-driven terahertz metamaterial modulator

An electrostatic drive, metamaterial technology, applied in instruments, electrical components, optics, etc., can solve problems such as complex processing technology, and achieve the effect of simplifying processing technology and reducing processing costs

Pending Publication Date: 2018-10-09
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But like other approaches to reconfiguration tuning, electrostatic tuning also requires the use of complex multilayer MEMS processes to fabricate the moving parts of the resonator
The electrostatic adjustment scheme also needs to design wire lines for each resonance unit, so the processing technology is more complicated

Method used

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Examples

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Embodiment 1

[0025] An electrostatically driven terahertz metamaterial modulator comprises a first metamaterial (1), a second metamaterial (2), a first electrode (11), a second electrode (21) and an insulating film (3). The insulating film (3) is located between the first supermaterial (1) and the second supermaterial (2). The first metamaterial (1) consists of a sheet-like substrate (10), a one-dimensional metal grating (12) distributed on one surface of the substrate, and metal resonant units distributed periodically along the direction of the grating metal strips between the grating metal strips (13) COMPOSITION. The second metamaterial is also composed of a sheet-like substrate, a one-dimensional metal grating distributed on one surface of the substrate, and metal resonant units distributed periodically along the direction of the grating metal strips between the grating metal strips. The direction of the gratings on the first metamaterial (1) and the second metamaterial (2) are the sa...

Embodiment 2

[0032] An electrostatically driven terahertz metamaterial modulator comprises a first metamaterial (1), a second metamaterial (2), a first electrode (11), a second electrode (21) and an insulating film (3). The insulating film (3) is located between the first supermaterial (1) and the second supermaterial (2). Both metamaterials consist of a sheet-like substrate, a one-dimensional metal grating distributed on one surface of the substrate, and metal resonant units distributed periodically along the direction of the grating metal strips between the grating metal strips. The orientation of the gratings on the two metamaterials is the same, the width of the grating metal strips is 10 μm, and the grating period is 150 μm. The ends of the metal gratings on both metamaterials are connected to electrodes by wires. The distribution periods of the metal resonant units on the two metamaterials are both 150 μm, and a polyimide flexible film with a thickness of 12.5 μm is selected as the ...

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Abstract

The invention discloses an electrostatically-driven terahertz metamaterial modulator. The modulator is composed of two mutually parallel metamaterials, and an insulating film located between two metamaterials; two metamaterials have the same metal grating, and the metal resonance structure distribution periods between the metal gratings are same. The distance between the metamaterials can be regulated by using electrostatic attracting force and the repulsive force, so that the coupling state between the resonance structures is changed, thereby realizing the modulation of the target frequency terahertz wave. The modulator disclosed by the invention is simple in processing technique, but still has the high modulation amplitude and wide effective frequency band. And the modulator can be applied to the microwave band and the terahertz wave band.

Description

technical field [0001] The invention relates to a terahertz band metamaterial modulator driven by electrostatic force, and belongs to the technical field of artificial metamaterials and electromagnetic wave modulation. Background technique [0002] Artificial metamaterials composed of subwavelength periodic structures propose a new direction for the design of terahertz wave modulators. A variety of terahertz modulators based on metamaterials have been verified in the fields of communication and imaging. [0003] According to different principles, tunable metamaterials can be divided into two categories: material tuning and reconfiguration tuning. Material adjustment, such as optical control semiconductor scheme, electric graphene scheme, temperature-controlled vanadium oxide scheme, temperature-controlled superconducting material scheme, etc., all use the adjustable dielectric constant of natural materials to realize the adjustment of metamaterials. Its tuning performance ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01Q15/00G02F1/00
CPCH01Q15/002H01Q15/0026H01Q15/0086G02F1/0009
Inventor 刘建军洪治
Owner CHINA JILIANG UNIV