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Positioning supporting tool for side surface grinding of ITO circular barrel target material and use method thereof

A technology of positioning support and outer surface, applied in the direction of the working carrier, etc., can solve the problems of poor fit and cracking of the target, and achieve the effects of low production cost, simple operation and good use effect

Active Publication Date: 2018-11-02
WUHU YINGRI TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Ordinary tooling is either easy to crack the target; or the fit is not good, and the outer diameter of the grinding exceeds the customer's requirements; so a positioning support tooling for grinding the outer surface of the cylindrical target is now needed

Method used

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  • Positioning supporting tool for side surface grinding of ITO circular barrel target material and use method thereof
  • Positioning supporting tool for side surface grinding of ITO circular barrel target material and use method thereof
  • Positioning supporting tool for side surface grinding of ITO circular barrel target material and use method thereof

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Embodiment Construction

[0032] The specific implementation manner of the present invention will be described in further detail below by describing the best embodiment with reference to the accompanying drawings.

[0033] A positioning support tool for grinding the outer surface of an ITO cylindrical target, the positioning support tool includes a plurality of single support tools, and the single support tools are sequentially connected by a rotating shaft 1; external threads are provided on the rotating shaft 1; The body support tooling is sleeved on the support sleeve 3 on the rotating shaft 1, and the support sleeve 3 is provided with a placement groove 8, and the placement groove 8 is provided with a support pad whose outer surface fits the inner wall of the cylindrical target when in use. 6. In the present invention, the rotating shaft 1 plays the role of main support. When in use, the two ends of the rotating shaft 1 are connected with the grinding equipment to play an initial supporting role; at...

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Abstract

The invention relates to the field of ITO circular barrel target material production equipment, and specifically relates to a positioning supporting tool for side surface grinding of an ITO circular barrel target material and a use method thereof. The positioning supporting tool comprises a plurality of single supporting tools which are sequentially connected through rotating shafts, wherein outerthreads are formed in the rotating shafts; each single supporting tool sleeves a supporting sleeve on the corresponding rotating shaft, and a storing groove is formed in each supporting sleeve; and asupporting cushion block of which the outer side surface is close to the inner wall of the circular barrel target material during use is arranged in each storing groove. According to the positioningsupporting tool for the side surface grinding of the ITO circular barrel target material, a simple mechanical positioning rod IE is adopted, so that the ITO target material is prevented in one hundredpercent from bum damage; and moreover, the efficiency is high, and the operation is simple; and the use effect good while the production cost is low.

Description

technical field [0001] The invention relates to the field of ITO cylindrical target production equipment, specifically a positioning support tool for grinding the outer surface of an ITO cylindrical target and its use method. Background technique [0002] After the sintering of the ITO cylindrical target is completed, the surface of the outer diameter will form an irregular circle. The outer surface must be ground to meet the size required by the customer, and the dimensional accuracy is generally ±0.1mm. Since the ITO cylindrical target is grinding the outer diameter, the target material, tooling and grinding wheel are all rotating rapidly. Moreover, the ITO target is a ceramic target, which is a brittle and hard material and is very easy to crack. Therefore, the requirements for the fit and material of the tooling and the target are relatively high. Ordinary tooling is either easy to crack the target; or the fit is not good, and the outer diameter of the grinding exceed...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/27
CPCB24B37/27
Inventor 张晓宇石煜王志强曾探
Owner WUHU YINGRI TECH CO LTD