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a source of evaporation

A technology of evaporation source and crucible, applied in the field of evaporation source, can solve the problems such as the thermal deformation of the mask plate, and achieve the effects of improving the absorption rate, improving the precision of evaporation, and improving the utilization efficiency.

Active Publication Date: 2020-11-06
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The embodiment of the present invention provides an evaporation source, which is used to improve the problem in the prior art that the mask plate is seriously deformed due to heat leakage from the evaporation source.

Method used

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] Embodiments of the present invention provide an evaporation source, such as figure 2 As shown, it includes a crucible 10 and a heater 20 for generating heat radiation. The crucible 10 includes a crucible body 11 and a nozzle 12 arranged on the top surface of the crucible body 11. Except for the top surface side of the crucible body 11, the rest of the crucible body 11 At least one of the sides is provided with a heat regulating assembly 30 ( figure 2...

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Abstract

The invention provides an evaporation source, which relates to the field of evaporation technology and is used to improve the problem in the prior art that a mask plate is deformed by heat due to excessive heat leakage from the evaporation source. The evaporation source includes a crucible and a heater for generating heat radiation. The crucible includes a crucible body and a nozzle arranged on the top surface of the crucible body. Except for the top surface side of the crucible body, the rest of the crucible body At least one of the sides is provided with a heat regulating component; the heat regulating component is used to convect heat radiation between the heat regulating component and the crucible body; wherein, the heat regulating component and the crucible body There are gaps in between.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation source. Background technique [0002] Organic Light-Emitting Diode (OLED) devices have many advantages such as simple manufacturing process, adjustable color, low power consumption, etc., and are both development and investment hotspots in the fields of display and lighting. As OLED display devices are more widely used, their manufacturing process is becoming more and more mature. At present, the commonly used manufacturing methods of OLED devices include evaporation, inkjet printing, thermal transfer and other methods. Among these production methods, the evaporation method is a relatively mature method and has been used in mass production. [0003] The evaporation process is to heat the evaporation material under certain vacuum conditions, so that the evaporation material melts (or sublimates) into a vapor composed of atoms, molecules or atomic groups, and t...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCC23C14/24C23C14/243C23C14/12H10K71/00
Inventor 刘金彪奉洛阳李有亮徐天宇谭瑞卫勇勇刘祥陈立文凯蒋勤文孙尚书刘鹏
Owner BOE TECH GRP CO LTD