A Vibration Displacement Measuring Device Based on Optical Interference
A technology of vibration displacement and measuring device, applied in measuring device, using optical device, measuring ultrasonic/sonic/infrasonic wave and other directions, can solve the problems of large vibration signal extraction and detection, error, etc., to achieve less measurement interference factors and high measurement sensitivity Effect
Inactive Publication Date: 2019-11-12
SHANDONG UNIV OF TECH
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Problems solved by technology
For some vibration signal extraction methods, when the signal is extracted, it is affected by some external factors such as noise or other vibrations, so that there are large errors in the extraction and detection of vibration signals
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Embodiment Construction
[0013] Below in conjunction with accompanying drawing, make further detailed description:
[0014] The main structure of this embodiment includes two parts: the electrostatic excitation vibration device of the beam and the signal detection device. The electrostatic excitation vibration device of the beam is characterized in that the electrostatic excitation vibration device of the beam is composed of an AC signal source 8, an electrostatic driving plate 7, a bottom plate 10, a cantilever beam 1, a side plate 5, a switch 9 and wires. The electrostatic drive plate 7 is fixed on the bottom plate 10, located directly above the cantilever beam 1, and its length is slightly shorter than the cantilever beam 1; the cantilever beam 1 is fixed on the side plate 5, the left end is fixed and the right end is free, and the upper surface of the cantilever beam 1 A layer of gold metal layer 6 is plated, the left end of the gold metal layer 6 is connected to the left end of the AC signal sour...
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A vibration displacement measurement device based on optical interference, including an electrostatic excitation vibration device of a beam and a signal detection device, the electrostatic excitation vibration device of a beam is composed of an AC signal source, an electrostatic driving plate, a bottom plate, a cantilever beam, a side plate, a switch and a wire Composition; the signal detection device is composed of a phase-sensitive diffraction device and a photodetector; the phase-sensitive diffraction device is composed of a supporting ring block, a diffraction grating, a diffraction grating, a substrate and a film; the photodetector is located below the phase-sensitive diffraction device. The cantilever beam is forced to vibrate under the excitation of the AC signal; when it vibrates, it will generate sound waves, which excite the membrane to vibrate, and use the interference effect of diffracted light and reflected light to detect the vibration of the beam.
Description
technical field [0001] The patent of the present invention relates to a vibration signal measuring device, in particular to a vibration signal extraction device, which belongs to the field of vibration signal detection. Background technique [0002] Vibration signal extraction is widely used in mechanical vibration research, automotive systems, sensors and other fields. In the extraction of vibration signals, how to eliminate the influence of external factors on the signal is the main factor that determines the accuracy of the signal. For some vibration signal extraction methods, some external factors such as noise or other vibrations are affected when the signal is extracted, so that there are large errors in the extraction and detection of the vibration signal. How to reduce the influence of external factors has become one of the problems restricting the improvement of the accuracy of vibration signal extraction. Optical detection is a non-contact measurement method, whi...
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IPC IPC(8): G01H9/00G01B11/02
CPCG01B11/02G01H9/00
Inventor 刘灿昌刘文晓李磊万磊孔维旭周长城
Owner SHANDONG UNIV OF TECH